10/19/2010	10:31:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/19/2010	10:31:23 AM	Recipe started at 10:31 AM
10/19/2010	10:31:23 AM	H2 valve closed
10/19/2010	10:31:23 AM	BCl3 valve closed
10/19/2010	10:31:23 AM	PH3 valve closed
10/19/2010	10:31:23 AM	SiCl4 pre valve closed
10/19/2010	10:31:23 AM	SiCl4 post valve closed
10/19/2010	10:31:23 AM	Main Vac valve closed
10/19/2010	10:31:23 AM	Bypass valve closed
10/19/2010	10:31:23 AM	Bubbler valve closed
10/19/2010	10:31:23 AM	Helium valve opened
10/19/2010	10:31:23 AM	Helium MFC set to  500.000000
10/19/2010	10:31:23 AM	H2 MFC set to  0.000000
10/19/2010	10:31:23 AM	BCl3 MFC set to  0.000000
10/19/2010	10:31:23 AM	PHl3 MFC set to  0.000000
10/19/2010	10:31:23 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:31:23 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:31:23 AM	Tube furnace set to 0
10/19/2010	10:32:43 AM	Helium valve closed
10/19/2010	10:32:43 AM	H2 valve closed
10/19/2010	10:32:43 AM	BCl3 valve closed
10/19/2010	10:32:43 AM	PH3 valve closed
10/19/2010	10:32:43 AM	SiCl4 pre valve closed
10/19/2010	10:32:43 AM	SiCl4 post valve closed
10/19/2010	10:32:43 AM	Main Vac valve closed
10/19/2010	10:32:43 AM	Bypass valve closed
10/19/2010	10:32:43 AM	Bubbler valve closed
10/19/2010	10:32:43 AM	Helium MFC set to  0.000000
10/19/2010	10:32:43 AM	H2 MFC set to  0.000000
10/19/2010	10:32:43 AM	BCl3 MFC set to  0.000000
10/19/2010	10:32:43 AM	PHl3 MFC set to  0.000000
10/19/2010	10:32:43 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:32:43 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:32:43 AM	Tube furnace set to 0
10/19/2010	10:32:44 AM	Run finished at 10:32 AM
10/19/2010	10:32:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/19/2010	10:41:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2010	10:41:19 AM	Recipe started at 10:41 AM
10/19/2010	10:41:19 AM	Helium valve closed
10/19/2010	10:41:19 AM	H2 valve closed
10/19/2010	10:41:19 AM	BCl3 valve closed
10/19/2010	10:41:19 AM	PH3 valve closed
10/19/2010	10:41:19 AM	SiCl4 pre valve closed
10/19/2010	10:41:19 AM	SiCl4 post valve closed
10/19/2010	10:41:19 AM	Main Vac valve closed
10/19/2010	10:41:19 AM	Bubbler valve closed
10/19/2010	10:41:19 AM	Bypass valve opened
10/19/2010	10:41:19 AM	Helium MFC set to  0.000000
10/19/2010	10:41:19 AM	H2 MFC set to  0.000000
10/19/2010	10:41:19 AM	BCl3 MFC set to  0.000000
10/19/2010	10:41:19 AM	PHl3 MFC set to  0.000000
10/19/2010	10:41:19 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:41:19 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:41:19 AM	Tube furnace set to 0
10/19/2010	10:42:07 AM	Helium valve closed
10/19/2010	10:42:07 AM	H2 valve closed
10/19/2010	10:42:07 AM	BCl3 valve closed
10/19/2010	10:42:07 AM	PH3 valve closed
10/19/2010	10:42:07 AM	SiCl4 pre valve closed
10/19/2010	10:42:07 AM	SiCl4 post valve closed
10/19/2010	10:42:07 AM	Bubbler valve closed
10/19/2010	10:42:07 AM	Main Vac valve opened
10/19/2010	10:42:07 AM	Bypass valve opened
10/19/2010	10:42:07 AM	Helium MFC set to  0.000000
10/19/2010	10:42:07 AM	H2 MFC set to  0.000000
10/19/2010	10:42:07 AM	BCl3 MFC set to  0.000000
10/19/2010	10:42:07 AM	PHl3 MFC set to  0.000000
10/19/2010	10:42:07 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:42:07 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:42:07 AM	Tube furnace set to 0
10/19/2010	10:42:08 AM	Run finished at 10:42 AM
10/19/2010	10:42:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2010	10:43:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	10:43:14 AM	Recipe started at 10:43 AM
10/19/2010	10:43:14 AM	Helium valve closed
10/19/2010	10:43:14 AM	H2 valve closed
10/19/2010	10:43:14 AM	BCl3 valve closed
10/19/2010	10:43:14 AM	PH3 valve closed
10/19/2010	10:43:14 AM	SiCl4 pre valve closed
10/19/2010	10:43:14 AM	SiCl4 post valve closed
10/19/2010	10:43:14 AM	Main Vac valve closed
10/19/2010	10:43:14 AM	Bubbler valve closed
10/19/2010	10:43:14 AM	Bypass valve opened
10/19/2010	10:43:14 AM	Helium MFC set to  0.000000
10/19/2010	10:43:14 AM	H2 MFC set to  0.000000
10/19/2010	10:43:14 AM	BCl3 MFC set to  0.000000
10/19/2010	10:43:14 AM	PHl3 MFC set to  0.000000
10/19/2010	10:43:14 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:43:14 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:43:14 AM	Tube furnace set to 0
10/19/2010	10:43:14 AM	Helium valve closed
10/19/2010	10:43:14 AM	H2 valve closed
10/19/2010	10:43:14 AM	BCl3 valve closed
10/19/2010	10:43:14 AM	PH3 valve closed
10/19/2010	10:43:14 AM	SiCl4 pre valve closed
10/19/2010	10:43:14 AM	SiCl4 post valve closed
10/19/2010	10:43:14 AM	Bubbler valve closed
10/19/2010	10:43:14 AM	Main Vac valve opened
10/19/2010	10:43:14 AM	Bypass valve opened
10/19/2010	10:43:14 AM	Helium MFC set to  0.000000
10/19/2010	10:43:14 AM	H2 MFC set to  0.000000
10/19/2010	10:43:14 AM	BCl3 MFC set to  0.000000
10/19/2010	10:43:14 AM	PHl3 MFC set to  0.000000
10/19/2010	10:43:14 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:43:14 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:43:14 AM	Tube furnace set to 0
10/19/2010	10:44:14 AM	H2 valve closed
10/19/2010	10:44:14 AM	BCl3 valve closed
10/19/2010	10:44:14 AM	PH3 valve closed
10/19/2010	10:44:14 AM	SiCl4 pre valve closed
10/19/2010	10:44:14 AM	SiCl4 post valve closed
10/19/2010	10:44:14 AM	Bubbler valve closed
10/19/2010	10:44:14 AM	Helium valve opened
10/19/2010	10:44:14 AM	Main Vac valve opened
10/19/2010	10:44:14 AM	Bypass valve opened
10/19/2010	10:44:14 AM	Helium MFC set to  100.000000
10/19/2010	10:44:14 AM	H2 MFC set to  0.000000
10/19/2010	10:44:14 AM	BCl3 MFC set to  0.000000
10/19/2010	10:44:14 AM	PHl3 MFC set to  0.000000
10/19/2010	10:44:14 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:44:14 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:44:14 AM	Tube furnace set to 0
10/19/2010	10:45:14 AM	Helium valve closed
10/19/2010	10:45:14 AM	H2 valve closed
10/19/2010	10:45:14 AM	BCl3 valve closed
10/19/2010	10:45:14 AM	PH3 valve closed
10/19/2010	10:45:14 AM	SiCl4 pre valve closed
10/19/2010	10:45:14 AM	SiCl4 post valve closed
10/19/2010	10:45:14 AM	Bubbler valve closed
10/19/2010	10:45:14 AM	Main Vac valve opened
10/19/2010	10:45:14 AM	Bypass valve opened
10/19/2010	10:45:14 AM	Helium MFC set to  0.000000
10/19/2010	10:45:14 AM	H2 MFC set to  0.000000
10/19/2010	10:45:14 AM	BCl3 MFC set to  0.000000
10/19/2010	10:45:14 AM	PHl3 MFC set to  0.000000
10/19/2010	10:45:14 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:45:14 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:45:15 AM	Tube furnace set to 0
10/19/2010	10:46:15 AM	H2 valve closed
10/19/2010	10:46:15 AM	BCl3 valve closed
10/19/2010	10:46:15 AM	PH3 valve closed
10/19/2010	10:46:15 AM	SiCl4 pre valve closed
10/19/2010	10:46:15 AM	SiCl4 post valve closed
10/19/2010	10:46:15 AM	Bubbler valve closed
10/19/2010	10:46:15 AM	Helium valve opened
10/19/2010	10:46:15 AM	Main Vac valve opened
10/19/2010	10:46:15 AM	Bypass valve opened
10/19/2010	10:46:15 AM	Helium MFC set to  100.000000
10/19/2010	10:46:15 AM	H2 MFC set to  0.000000
10/19/2010	10:46:15 AM	BCl3 MFC set to  0.000000
10/19/2010	10:46:15 AM	PHl3 MFC set to  0.000000
10/19/2010	10:46:15 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:46:15 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:46:15 AM	Tube furnace set to 0
10/19/2010	10:47:15 AM	Helium valve closed
10/19/2010	10:47:15 AM	H2 valve closed
10/19/2010	10:47:15 AM	BCl3 valve closed
10/19/2010	10:47:15 AM	PH3 valve closed
10/19/2010	10:47:15 AM	SiCl4 pre valve closed
10/19/2010	10:47:15 AM	SiCl4 post valve closed
10/19/2010	10:47:15 AM	Bubbler valve closed
10/19/2010	10:47:15 AM	Main Vac valve opened
10/19/2010	10:47:15 AM	Bypass valve opened
10/19/2010	10:47:15 AM	Helium MFC set to  0.000000
10/19/2010	10:47:15 AM	H2 MFC set to  0.000000
10/19/2010	10:47:15 AM	BCl3 MFC set to  0.000000
10/19/2010	10:47:15 AM	PHl3 MFC set to  0.000000
10/19/2010	10:47:15 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:47:15 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:47:15 AM	Tube furnace set to 0
10/19/2010	10:48:15 AM	H2 valve closed
10/19/2010	10:48:15 AM	BCl3 valve closed
10/19/2010	10:48:15 AM	PH3 valve closed
10/19/2010	10:48:15 AM	SiCl4 pre valve closed
10/19/2010	10:48:15 AM	SiCl4 post valve closed
10/19/2010	10:48:15 AM	Bubbler valve closed
10/19/2010	10:48:15 AM	Helium valve opened
10/19/2010	10:48:15 AM	Main Vac valve opened
10/19/2010	10:48:15 AM	Bypass valve opened
10/19/2010	10:48:15 AM	Helium MFC set to  100.000000
10/19/2010	10:48:15 AM	H2 MFC set to  0.000000
10/19/2010	10:48:15 AM	BCl3 MFC set to  0.000000
10/19/2010	10:48:15 AM	PHl3 MFC set to  0.000000
10/19/2010	10:48:15 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:48:15 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:48:15 AM	Tube furnace set to 0
10/19/2010	10:49:15 AM	Helium valve closed
10/19/2010	10:49:15 AM	H2 valve closed
10/19/2010	10:49:15 AM	BCl3 valve closed
10/19/2010	10:49:15 AM	PH3 valve closed
10/19/2010	10:49:15 AM	SiCl4 pre valve closed
10/19/2010	10:49:15 AM	SiCl4 post valve closed
10/19/2010	10:49:15 AM	Bubbler valve closed
10/19/2010	10:49:15 AM	Main Vac valve opened
10/19/2010	10:49:15 AM	Bypass valve opened
10/19/2010	10:49:15 AM	Helium MFC set to  0.000000
10/19/2010	10:49:15 AM	H2 MFC set to  0.000000
10/19/2010	10:49:15 AM	BCl3 MFC set to  0.000000
10/19/2010	10:49:15 AM	PHl3 MFC set to  0.000000
10/19/2010	10:49:15 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:49:15 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:49:15 AM	Tube furnace set to 0
10/19/2010	10:50:15 AM	H2 valve closed
10/19/2010	10:50:15 AM	BCl3 valve closed
10/19/2010	10:50:15 AM	PH3 valve closed
10/19/2010	10:50:15 AM	SiCl4 pre valve closed
10/19/2010	10:50:15 AM	SiCl4 post valve closed
10/19/2010	10:50:15 AM	Bubbler valve closed
10/19/2010	10:50:15 AM	Helium valve opened
10/19/2010	10:50:15 AM	Main Vac valve opened
10/19/2010	10:50:15 AM	Bypass valve opened
10/19/2010	10:50:15 AM	Helium MFC set to  100.000000
10/19/2010	10:50:15 AM	H2 MFC set to  0.000000
10/19/2010	10:50:15 AM	BCl3 MFC set to  0.000000
10/19/2010	10:50:15 AM	PHl3 MFC set to  0.000000
10/19/2010	10:50:15 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:50:15 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:50:16 AM	Tube furnace set to 0
10/19/2010	10:51:16 AM	Helium valve closed
10/19/2010	10:51:16 AM	H2 valve closed
10/19/2010	10:51:16 AM	BCl3 valve closed
10/19/2010	10:51:16 AM	PH3 valve closed
10/19/2010	10:51:16 AM	SiCl4 pre valve closed
10/19/2010	10:51:16 AM	SiCl4 post valve closed
10/19/2010	10:51:16 AM	Bubbler valve closed
10/19/2010	10:51:16 AM	Main Vac valve opened
10/19/2010	10:51:16 AM	Bypass valve opened
10/19/2010	10:51:16 AM	Helium MFC set to  0.000000
10/19/2010	10:51:16 AM	H2 MFC set to  0.000000
10/19/2010	10:51:16 AM	BCl3 MFC set to  0.000000
10/19/2010	10:51:16 AM	PHl3 MFC set to  0.000000
10/19/2010	10:51:16 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:51:16 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:51:16 AM	Tube furnace set to 0
10/19/2010	10:52:16 AM	H2 valve closed
10/19/2010	10:52:16 AM	BCl3 valve closed
10/19/2010	10:52:16 AM	PH3 valve closed
10/19/2010	10:52:16 AM	SiCl4 pre valve closed
10/19/2010	10:52:16 AM	SiCl4 post valve closed
10/19/2010	10:52:16 AM	Bubbler valve closed
10/19/2010	10:52:16 AM	Helium valve opened
10/19/2010	10:52:16 AM	Main Vac valve opened
10/19/2010	10:52:16 AM	Bypass valve opened
10/19/2010	10:52:16 AM	Helium MFC set to  100.000000
10/19/2010	10:52:16 AM	H2 MFC set to  0.000000
10/19/2010	10:52:16 AM	BCl3 MFC set to  0.000000
10/19/2010	10:52:16 AM	PHl3 MFC set to  0.000000
10/19/2010	10:52:16 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:52:16 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:52:16 AM	Tube furnace set to 0
10/19/2010	10:53:16 AM	Helium valve closed
10/19/2010	10:53:16 AM	H2 valve closed
10/19/2010	10:53:16 AM	BCl3 valve closed
10/19/2010	10:53:16 AM	PH3 valve closed
10/19/2010	10:53:16 AM	SiCl4 pre valve closed
10/19/2010	10:53:16 AM	SiCl4 post valve closed
10/19/2010	10:53:16 AM	Bubbler valve closed
10/19/2010	10:53:16 AM	Main Vac valve opened
10/19/2010	10:53:16 AM	Bypass valve opened
10/19/2010	10:53:16 AM	Helium MFC set to  0.000000
10/19/2010	10:53:16 AM	H2 MFC set to  0.000000
10/19/2010	10:53:16 AM	BCl3 MFC set to  0.000000
10/19/2010	10:53:16 AM	PHl3 MFC set to  0.000000
10/19/2010	10:53:16 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:53:16 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:53:16 AM	Tube furnace set to 0
10/19/2010	10:54:16 AM	H2 valve closed
10/19/2010	10:54:16 AM	BCl3 valve closed
10/19/2010	10:54:16 AM	PH3 valve closed
10/19/2010	10:54:16 AM	SiCl4 pre valve closed
10/19/2010	10:54:16 AM	SiCl4 post valve closed
10/19/2010	10:54:16 AM	Bubbler valve closed
10/19/2010	10:54:16 AM	Helium valve opened
10/19/2010	10:54:16 AM	Main Vac valve opened
10/19/2010	10:54:16 AM	Bypass valve opened
10/19/2010	10:54:16 AM	Helium MFC set to  100.000000
10/19/2010	10:54:16 AM	H2 MFC set to  0.000000
10/19/2010	10:54:16 AM	BCl3 MFC set to  0.000000
10/19/2010	10:54:16 AM	PHl3 MFC set to  0.000000
10/19/2010	10:54:16 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:54:16 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:54:16 AM	Tube furnace set to 0
10/19/2010	10:55:16 AM	Helium valve closed
10/19/2010	10:55:16 AM	H2 valve closed
10/19/2010	10:55:16 AM	BCl3 valve closed
10/19/2010	10:55:16 AM	PH3 valve closed
10/19/2010	10:55:16 AM	SiCl4 pre valve closed
10/19/2010	10:55:16 AM	SiCl4 post valve closed
10/19/2010	10:55:16 AM	Bubbler valve closed
10/19/2010	10:55:16 AM	Main Vac valve opened
10/19/2010	10:55:16 AM	Bypass valve opened
10/19/2010	10:55:16 AM	Helium MFC set to  0.000000
10/19/2010	10:55:16 AM	H2 MFC set to  0.000000
10/19/2010	10:55:16 AM	BCl3 MFC set to  0.000000
10/19/2010	10:55:16 AM	PHl3 MFC set to  0.000000
10/19/2010	10:55:16 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:55:16 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:55:17 AM	Tube furnace set to 0
10/19/2010	10:56:17 AM	H2 valve closed
10/19/2010	10:56:17 AM	BCl3 valve closed
10/19/2010	10:56:17 AM	PH3 valve closed
10/19/2010	10:56:17 AM	SiCl4 pre valve closed
10/19/2010	10:56:17 AM	SiCl4 post valve closed
10/19/2010	10:56:17 AM	Bubbler valve closed
10/19/2010	10:56:17 AM	Helium valve opened
10/19/2010	10:56:17 AM	Main Vac valve opened
10/19/2010	10:56:17 AM	Bypass valve opened
10/19/2010	10:56:17 AM	Helium MFC set to  100.000000
10/19/2010	10:56:17 AM	H2 MFC set to  0.000000
10/19/2010	10:56:17 AM	BCl3 MFC set to  0.000000
10/19/2010	10:56:17 AM	PHl3 MFC set to  0.000000
10/19/2010	10:56:17 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:56:17 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:56:17 AM	Tube furnace set to 0
10/19/2010	10:57:17 AM	Helium valve closed
10/19/2010	10:57:17 AM	H2 valve closed
10/19/2010	10:57:17 AM	BCl3 valve closed
10/19/2010	10:57:17 AM	PH3 valve closed
10/19/2010	10:57:17 AM	SiCl4 pre valve closed
10/19/2010	10:57:17 AM	SiCl4 post valve closed
10/19/2010	10:57:17 AM	Bubbler valve closed
10/19/2010	10:57:17 AM	Main Vac valve opened
10/19/2010	10:57:17 AM	Bypass valve opened
10/19/2010	10:57:17 AM	Helium MFC set to  0.000000
10/19/2010	10:57:17 AM	H2 MFC set to  0.000000
10/19/2010	10:57:17 AM	BCl3 MFC set to  0.000000
10/19/2010	10:57:17 AM	PHl3 MFC set to  0.000000
10/19/2010	10:57:17 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:57:17 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:57:17 AM	Tube furnace set to 0
10/19/2010	10:58:17 AM	H2 valve closed
10/19/2010	10:58:17 AM	BCl3 valve closed
10/19/2010	10:58:17 AM	PH3 valve closed
10/19/2010	10:58:17 AM	SiCl4 pre valve closed
10/19/2010	10:58:17 AM	SiCl4 post valve closed
10/19/2010	10:58:17 AM	Bubbler valve closed
10/19/2010	10:58:17 AM	Helium valve opened
10/19/2010	10:58:17 AM	Main Vac valve opened
10/19/2010	10:58:17 AM	Bypass valve opened
10/19/2010	10:58:17 AM	Helium MFC set to  100.000000
10/19/2010	10:58:17 AM	H2 MFC set to  0.000000
10/19/2010	10:58:17 AM	BCl3 MFC set to  0.000000
10/19/2010	10:58:17 AM	PHl3 MFC set to  0.000000
10/19/2010	10:58:17 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:58:17 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:58:17 AM	Tube furnace set to 0
10/19/2010	10:59:17 AM	Helium valve closed
10/19/2010	10:59:17 AM	H2 valve closed
10/19/2010	10:59:17 AM	BCl3 valve closed
10/19/2010	10:59:17 AM	PH3 valve closed
10/19/2010	10:59:17 AM	SiCl4 pre valve closed
10/19/2010	10:59:17 AM	SiCl4 post valve closed
10/19/2010	10:59:17 AM	Bubbler valve closed
10/19/2010	10:59:17 AM	Main Vac valve opened
10/19/2010	10:59:17 AM	Bypass valve opened
10/19/2010	10:59:17 AM	Helium MFC set to  0.000000
10/19/2010	10:59:17 AM	H2 MFC set to  0.000000
10/19/2010	10:59:17 AM	BCl3 MFC set to  0.000000
10/19/2010	10:59:17 AM	PHl3 MFC set to  0.000000
10/19/2010	10:59:17 AM	SiCl4 MFC set to  0.000000
10/19/2010	10:59:17 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	10:59:17 AM	Tube furnace set to 0
10/19/2010	11:00:17 AM	H2 valve closed
10/19/2010	11:00:17 AM	BCl3 valve closed
10/19/2010	11:00:17 AM	PH3 valve closed
10/19/2010	11:00:17 AM	SiCl4 pre valve closed
10/19/2010	11:00:17 AM	SiCl4 post valve closed
10/19/2010	11:00:17 AM	Bubbler valve closed
10/19/2010	11:00:17 AM	Helium valve opened
10/19/2010	11:00:17 AM	Main Vac valve opened
10/19/2010	11:00:17 AM	Bypass valve opened
10/19/2010	11:00:17 AM	Helium MFC set to  100.000000
10/19/2010	11:00:17 AM	H2 MFC set to  0.000000
10/19/2010	11:00:17 AM	BCl3 MFC set to  0.000000
10/19/2010	11:00:17 AM	PHl3 MFC set to  0.000000
10/19/2010	11:00:17 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:00:17 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:00:18 AM	Tube furnace set to 0
10/19/2010	11:01:18 AM	Helium valve closed
10/19/2010	11:01:18 AM	H2 valve closed
10/19/2010	11:01:18 AM	BCl3 valve closed
10/19/2010	11:01:18 AM	PH3 valve closed
10/19/2010	11:01:18 AM	SiCl4 pre valve closed
10/19/2010	11:01:18 AM	SiCl4 post valve closed
10/19/2010	11:01:18 AM	Bubbler valve closed
10/19/2010	11:01:18 AM	Main Vac valve opened
10/19/2010	11:01:18 AM	Bypass valve opened
10/19/2010	11:01:18 AM	Helium MFC set to  0.000000
10/19/2010	11:01:18 AM	H2 MFC set to  0.000000
10/19/2010	11:01:18 AM	BCl3 MFC set to  0.000000
10/19/2010	11:01:18 AM	PHl3 MFC set to  0.000000
10/19/2010	11:01:18 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:01:18 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:01:18 AM	Tube furnace set to 0
10/19/2010	11:02:18 AM	H2 valve closed
10/19/2010	11:02:18 AM	BCl3 valve closed
10/19/2010	11:02:18 AM	PH3 valve closed
10/19/2010	11:02:18 AM	SiCl4 pre valve closed
10/19/2010	11:02:18 AM	SiCl4 post valve closed
10/19/2010	11:02:18 AM	Bubbler valve closed
10/19/2010	11:02:18 AM	Helium valve opened
10/19/2010	11:02:18 AM	Main Vac valve opened
10/19/2010	11:02:18 AM	Bypass valve opened
10/19/2010	11:02:18 AM	Helium MFC set to  100.000000
10/19/2010	11:02:18 AM	H2 MFC set to  0.000000
10/19/2010	11:02:18 AM	BCl3 MFC set to  0.000000
10/19/2010	11:02:18 AM	PHl3 MFC set to  0.000000
10/19/2010	11:02:18 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:02:18 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:02:18 AM	Tube furnace set to 0
10/19/2010	11:03:18 AM	Helium valve closed
10/19/2010	11:03:18 AM	H2 valve closed
10/19/2010	11:03:18 AM	BCl3 valve closed
10/19/2010	11:03:18 AM	PH3 valve closed
10/19/2010	11:03:18 AM	SiCl4 pre valve closed
10/19/2010	11:03:18 AM	SiCl4 post valve closed
10/19/2010	11:03:18 AM	Bubbler valve closed
10/19/2010	11:03:18 AM	Main Vac valve opened
10/19/2010	11:03:18 AM	Bypass valve opened
10/19/2010	11:03:18 AM	Helium MFC set to  0.000000
10/19/2010	11:03:18 AM	H2 MFC set to  0.000000
10/19/2010	11:03:18 AM	BCl3 MFC set to  0.000000
10/19/2010	11:03:18 AM	PHl3 MFC set to  0.000000
10/19/2010	11:03:18 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:03:18 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:03:18 AM	Tube furnace set to 0
10/19/2010	11:03:19 AM	Run finished at 11:03 AM
10/19/2010	11:03:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	11:05:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	11:05:35 AM	Recipe started at 11:05 AM
10/19/2010	11:05:35 AM	Helium valve closed
10/19/2010	11:05:35 AM	H2 valve closed
10/19/2010	11:05:35 AM	BCl3 valve closed
10/19/2010	11:05:35 AM	PH3 valve closed
10/19/2010	11:05:35 AM	SiCl4 pre valve closed
10/19/2010	11:05:35 AM	SiCl4 post valve closed
10/19/2010	11:05:35 AM	Main Vac valve closed
10/19/2010	11:05:35 AM	Bubbler valve closed
10/19/2010	11:05:35 AM	Bypass valve opened
10/19/2010	11:05:35 AM	Helium MFC set to  0.000000
10/19/2010	11:05:35 AM	H2 MFC set to  0.000000
10/19/2010	11:05:35 AM	BCl3 MFC set to  0.000000
10/19/2010	11:05:35 AM	PHl3 MFC set to  0.000000
10/19/2010	11:05:35 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:05:35 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:05:35 AM	Tube furnace set to 0
10/19/2010	11:05:36 AM	Helium valve closed
10/19/2010	11:05:36 AM	H2 valve closed
10/19/2010	11:05:36 AM	BCl3 valve closed
10/19/2010	11:05:36 AM	PH3 valve closed
10/19/2010	11:05:36 AM	SiCl4 pre valve closed
10/19/2010	11:05:36 AM	SiCl4 post valve closed
10/19/2010	11:05:36 AM	Bubbler valve closed
10/19/2010	11:05:36 AM	Main Vac valve opened
10/19/2010	11:05:36 AM	Bypass valve opened
10/19/2010	11:05:36 AM	Helium MFC set to  0.000000
10/19/2010	11:05:36 AM	H2 MFC set to  0.000000
10/19/2010	11:05:36 AM	BCl3 MFC set to  0.000000
10/19/2010	11:05:36 AM	PHl3 MFC set to  0.000000
10/19/2010	11:05:36 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:05:36 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:05:36 AM	Tube furnace set to 0
10/19/2010	11:06:36 AM	H2 valve closed
10/19/2010	11:06:36 AM	BCl3 valve closed
10/19/2010	11:06:36 AM	PH3 valve closed
10/19/2010	11:06:36 AM	SiCl4 pre valve closed
10/19/2010	11:06:36 AM	SiCl4 post valve closed
10/19/2010	11:06:36 AM	Bubbler valve closed
10/19/2010	11:06:36 AM	Helium valve opened
10/19/2010	11:06:36 AM	Main Vac valve opened
10/19/2010	11:06:36 AM	Bypass valve opened
10/19/2010	11:06:36 AM	Helium MFC set to  100.000000
10/19/2010	11:06:36 AM	H2 MFC set to  0.000000
10/19/2010	11:06:36 AM	BCl3 MFC set to  0.000000
10/19/2010	11:06:36 AM	PHl3 MFC set to  0.000000
10/19/2010	11:06:36 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:06:36 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:06:36 AM	Tube furnace set to 0
10/19/2010	11:07:36 AM	Helium valve closed
10/19/2010	11:07:36 AM	H2 valve closed
10/19/2010	11:07:36 AM	BCl3 valve closed
10/19/2010	11:07:36 AM	PH3 valve closed
10/19/2010	11:07:36 AM	SiCl4 pre valve closed
10/19/2010	11:07:36 AM	SiCl4 post valve closed
10/19/2010	11:07:36 AM	Bubbler valve closed
10/19/2010	11:07:36 AM	Main Vac valve opened
10/19/2010	11:07:36 AM	Bypass valve opened
10/19/2010	11:07:36 AM	Helium MFC set to  0.000000
10/19/2010	11:07:36 AM	H2 MFC set to  0.000000
10/19/2010	11:07:36 AM	BCl3 MFC set to  0.000000
10/19/2010	11:07:36 AM	PHl3 MFC set to  0.000000
10/19/2010	11:07:36 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:07:36 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:07:36 AM	Tube furnace set to 0
10/19/2010	11:08:36 AM	H2 valve closed
10/19/2010	11:08:36 AM	BCl3 valve closed
10/19/2010	11:08:36 AM	PH3 valve closed
10/19/2010	11:08:36 AM	SiCl4 pre valve closed
10/19/2010	11:08:36 AM	SiCl4 post valve closed
10/19/2010	11:08:36 AM	Bubbler valve closed
10/19/2010	11:08:36 AM	Helium valve opened
10/19/2010	11:08:36 AM	Main Vac valve opened
10/19/2010	11:08:36 AM	Bypass valve opened
10/19/2010	11:08:36 AM	Helium MFC set to  100.000000
10/19/2010	11:08:36 AM	H2 MFC set to  0.000000
10/19/2010	11:08:36 AM	BCl3 MFC set to  0.000000
10/19/2010	11:08:36 AM	PHl3 MFC set to  0.000000
10/19/2010	11:08:36 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:08:36 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:08:36 AM	Tube furnace set to 0
10/19/2010	11:09:37 AM	Helium valve closed
10/19/2010	11:09:37 AM	H2 valve closed
10/19/2010	11:09:37 AM	BCl3 valve closed
10/19/2010	11:09:37 AM	PH3 valve closed
10/19/2010	11:09:37 AM	SiCl4 pre valve closed
10/19/2010	11:09:37 AM	SiCl4 post valve closed
10/19/2010	11:09:37 AM	Bubbler valve closed
10/19/2010	11:09:37 AM	Main Vac valve opened
10/19/2010	11:09:37 AM	Bypass valve opened
10/19/2010	11:09:37 AM	Helium MFC set to  0.000000
10/19/2010	11:09:37 AM	H2 MFC set to  0.000000
10/19/2010	11:09:37 AM	BCl3 MFC set to  0.000000
10/19/2010	11:09:37 AM	PHl3 MFC set to  0.000000
10/19/2010	11:09:37 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:09:37 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:09:37 AM	Tube furnace set to 0
10/19/2010	11:10:37 AM	H2 valve closed
10/19/2010	11:10:37 AM	BCl3 valve closed
10/19/2010	11:10:37 AM	PH3 valve closed
10/19/2010	11:10:37 AM	SiCl4 pre valve closed
10/19/2010	11:10:37 AM	SiCl4 post valve closed
10/19/2010	11:10:37 AM	Bubbler valve closed
10/19/2010	11:10:37 AM	Helium valve opened
10/19/2010	11:10:37 AM	Main Vac valve opened
10/19/2010	11:10:37 AM	Bypass valve opened
10/19/2010	11:10:37 AM	Helium MFC set to  100.000000
10/19/2010	11:10:37 AM	H2 MFC set to  0.000000
10/19/2010	11:10:37 AM	BCl3 MFC set to  0.000000
10/19/2010	11:10:37 AM	PHl3 MFC set to  0.000000
10/19/2010	11:10:37 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:10:37 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:10:37 AM	Tube furnace set to 0
10/19/2010	11:11:37 AM	Helium valve closed
10/19/2010	11:11:37 AM	H2 valve closed
10/19/2010	11:11:37 AM	BCl3 valve closed
10/19/2010	11:11:37 AM	PH3 valve closed
10/19/2010	11:11:37 AM	SiCl4 pre valve closed
10/19/2010	11:11:37 AM	SiCl4 post valve closed
10/19/2010	11:11:37 AM	Bubbler valve closed
10/19/2010	11:11:37 AM	Main Vac valve opened
10/19/2010	11:11:37 AM	Bypass valve opened
10/19/2010	11:11:37 AM	Helium MFC set to  0.000000
10/19/2010	11:11:37 AM	H2 MFC set to  0.000000
10/19/2010	11:11:37 AM	BCl3 MFC set to  0.000000
10/19/2010	11:11:37 AM	PHl3 MFC set to  0.000000
10/19/2010	11:11:37 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:11:37 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:11:37 AM	Tube furnace set to 0
10/19/2010	11:12:37 AM	H2 valve closed
10/19/2010	11:12:37 AM	BCl3 valve closed
10/19/2010	11:12:37 AM	PH3 valve closed
10/19/2010	11:12:37 AM	SiCl4 pre valve closed
10/19/2010	11:12:37 AM	SiCl4 post valve closed
10/19/2010	11:12:37 AM	Bubbler valve closed
10/19/2010	11:12:37 AM	Helium valve opened
10/19/2010	11:12:37 AM	Main Vac valve opened
10/19/2010	11:12:37 AM	Bypass valve opened
10/19/2010	11:12:37 AM	Helium MFC set to  100.000000
10/19/2010	11:12:37 AM	H2 MFC set to  0.000000
10/19/2010	11:12:37 AM	BCl3 MFC set to  0.000000
10/19/2010	11:12:37 AM	PHl3 MFC set to  0.000000
10/19/2010	11:12:37 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:12:37 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:12:37 AM	Tube furnace set to 0
10/19/2010	11:13:37 AM	Helium valve closed
10/19/2010	11:13:37 AM	H2 valve closed
10/19/2010	11:13:37 AM	BCl3 valve closed
10/19/2010	11:13:37 AM	PH3 valve closed
10/19/2010	11:13:37 AM	SiCl4 pre valve closed
10/19/2010	11:13:37 AM	SiCl4 post valve closed
10/19/2010	11:13:37 AM	Bubbler valve closed
10/19/2010	11:13:37 AM	Main Vac valve opened
10/19/2010	11:13:37 AM	Bypass valve opened
10/19/2010	11:13:37 AM	Helium MFC set to  0.000000
10/19/2010	11:13:37 AM	H2 MFC set to  0.000000
10/19/2010	11:13:37 AM	BCl3 MFC set to  0.000000
10/19/2010	11:13:37 AM	PHl3 MFC set to  0.000000
10/19/2010	11:13:37 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:13:37 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:13:37 AM	Tube furnace set to 0
10/19/2010	11:14:37 AM	H2 valve closed
10/19/2010	11:14:38 AM	BCl3 valve closed
10/19/2010	11:14:38 AM	PH3 valve closed
10/19/2010	11:14:38 AM	SiCl4 pre valve closed
10/19/2010	11:14:38 AM	SiCl4 post valve closed
10/19/2010	11:14:38 AM	Bubbler valve closed
10/19/2010	11:14:38 AM	Helium valve opened
10/19/2010	11:14:38 AM	Main Vac valve opened
10/19/2010	11:14:38 AM	Bypass valve opened
10/19/2010	11:14:38 AM	Helium MFC set to  100.000000
10/19/2010	11:14:38 AM	H2 MFC set to  0.000000
10/19/2010	11:14:38 AM	BCl3 MFC set to  0.000000
10/19/2010	11:14:38 AM	PHl3 MFC set to  0.000000
10/19/2010	11:14:38 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:14:38 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:14:38 AM	Tube furnace set to 0
10/19/2010	11:15:38 AM	Helium valve closed
10/19/2010	11:15:38 AM	H2 valve closed
10/19/2010	11:15:38 AM	BCl3 valve closed
10/19/2010	11:15:38 AM	PH3 valve closed
10/19/2010	11:15:38 AM	SiCl4 pre valve closed
10/19/2010	11:15:38 AM	SiCl4 post valve closed
10/19/2010	11:15:38 AM	Bubbler valve closed
10/19/2010	11:15:38 AM	Main Vac valve opened
10/19/2010	11:15:38 AM	Bypass valve opened
10/19/2010	11:15:38 AM	Helium MFC set to  0.000000
10/19/2010	11:15:38 AM	H2 MFC set to  0.000000
10/19/2010	11:15:38 AM	BCl3 MFC set to  0.000000
10/19/2010	11:15:38 AM	PHl3 MFC set to  0.000000
10/19/2010	11:15:38 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:15:38 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:15:38 AM	Tube furnace set to 0
10/19/2010	11:16:38 AM	H2 valve closed
10/19/2010	11:16:38 AM	BCl3 valve closed
10/19/2010	11:16:38 AM	PH3 valve closed
10/19/2010	11:16:38 AM	SiCl4 pre valve closed
10/19/2010	11:16:38 AM	SiCl4 post valve closed
10/19/2010	11:16:38 AM	Bubbler valve closed
10/19/2010	11:16:38 AM	Helium valve opened
10/19/2010	11:16:38 AM	Main Vac valve opened
10/19/2010	11:16:38 AM	Bypass valve opened
10/19/2010	11:16:38 AM	Helium MFC set to  100.000000
10/19/2010	11:16:38 AM	H2 MFC set to  0.000000
10/19/2010	11:16:38 AM	BCl3 MFC set to  0.000000
10/19/2010	11:16:38 AM	PHl3 MFC set to  0.000000
10/19/2010	11:16:38 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:16:38 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:16:38 AM	Tube furnace set to 0
10/19/2010	11:17:38 AM	Helium valve closed
10/19/2010	11:17:38 AM	H2 valve closed
10/19/2010	11:17:38 AM	BCl3 valve closed
10/19/2010	11:17:38 AM	PH3 valve closed
10/19/2010	11:17:38 AM	SiCl4 pre valve closed
10/19/2010	11:17:38 AM	SiCl4 post valve closed
10/19/2010	11:17:38 AM	Bubbler valve closed
10/19/2010	11:17:38 AM	Main Vac valve opened
10/19/2010	11:17:38 AM	Bypass valve opened
10/19/2010	11:17:38 AM	Helium MFC set to  0.000000
10/19/2010	11:17:38 AM	H2 MFC set to  0.000000
10/19/2010	11:17:38 AM	BCl3 MFC set to  0.000000
10/19/2010	11:17:38 AM	PHl3 MFC set to  0.000000
10/19/2010	11:17:38 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:17:38 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:17:38 AM	Tube furnace set to 0
10/19/2010	11:18:38 AM	H2 valve closed
10/19/2010	11:18:38 AM	BCl3 valve closed
10/19/2010	11:18:38 AM	PH3 valve closed
10/19/2010	11:18:38 AM	SiCl4 pre valve closed
10/19/2010	11:18:38 AM	SiCl4 post valve closed
10/19/2010	11:18:38 AM	Bubbler valve closed
10/19/2010	11:18:38 AM	Helium valve opened
10/19/2010	11:18:38 AM	Main Vac valve opened
10/19/2010	11:18:38 AM	Bypass valve opened
10/19/2010	11:18:38 AM	Helium MFC set to  100.000000
10/19/2010	11:18:38 AM	H2 MFC set to  0.000000
10/19/2010	11:18:38 AM	BCl3 MFC set to  0.000000
10/19/2010	11:18:38 AM	PHl3 MFC set to  0.000000
10/19/2010	11:18:38 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:18:38 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:18:38 AM	Tube furnace set to 0
10/19/2010	11:19:27 AM	Helium valve closed
10/19/2010	11:19:27 AM	H2 valve closed
10/19/2010	11:19:27 AM	BCl3 valve closed
10/19/2010	11:19:27 AM	PH3 valve closed
10/19/2010	11:19:28 AM	SiCl4 pre valve closed
10/19/2010	11:19:28 AM	SiCl4 post valve closed
10/19/2010	11:19:28 AM	Bubbler valve closed
10/19/2010	11:19:28 AM	Main Vac valve opened
10/19/2010	11:19:28 AM	Bypass valve opened
10/19/2010	11:19:28 AM	Helium MFC set to  0.000000
10/19/2010	11:19:28 AM	H2 MFC set to  0.000000
10/19/2010	11:19:28 AM	BCl3 MFC set to  0.000000
10/19/2010	11:19:28 AM	PHl3 MFC set to  0.000000
10/19/2010	11:19:28 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:19:28 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:19:28 AM	Tube furnace set to 0
10/19/2010	11:19:28 AM	H2 valve closed
10/19/2010	11:19:28 AM	BCl3 valve closed
10/19/2010	11:19:28 AM	PH3 valve closed
10/19/2010	11:19:28 AM	SiCl4 pre valve closed
10/19/2010	11:19:28 AM	SiCl4 post valve closed
10/19/2010	11:19:28 AM	Bubbler valve closed
10/19/2010	11:19:28 AM	Helium valve opened
10/19/2010	11:19:28 AM	Main Vac valve opened
10/19/2010	11:19:28 AM	Bypass valve opened
10/19/2010	11:19:28 AM	Helium MFC set to  100.000000
10/19/2010	11:19:28 AM	H2 MFC set to  0.000000
10/19/2010	11:19:28 AM	BCl3 MFC set to  0.000000
10/19/2010	11:19:28 AM	PHl3 MFC set to  0.000000
10/19/2010	11:19:28 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:19:28 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:19:29 AM	Tube furnace set to 0
10/19/2010	11:19:29 AM	Helium valve closed
10/19/2010	11:19:29 AM	H2 valve closed
10/19/2010	11:19:29 AM	BCl3 valve closed
10/19/2010	11:19:29 AM	PH3 valve closed
10/19/2010	11:19:29 AM	SiCl4 pre valve closed
10/19/2010	11:19:29 AM	SiCl4 post valve closed
10/19/2010	11:19:29 AM	Bubbler valve closed
10/19/2010	11:19:29 AM	Main Vac valve opened
10/19/2010	11:19:29 AM	Bypass valve opened
10/19/2010	11:19:29 AM	Helium MFC set to  0.000000
10/19/2010	11:19:29 AM	H2 MFC set to  0.000000
10/19/2010	11:19:29 AM	BCl3 MFC set to  0.000000
10/19/2010	11:19:29 AM	PHl3 MFC set to  0.000000
10/19/2010	11:19:29 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:19:29 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:19:29 AM	Tube furnace set to 0
10/19/2010	11:19:30 AM	H2 valve closed
10/19/2010	11:19:30 AM	BCl3 valve closed
10/19/2010	11:19:30 AM	PH3 valve closed
10/19/2010	11:19:30 AM	SiCl4 pre valve closed
10/19/2010	11:19:30 AM	SiCl4 post valve closed
10/19/2010	11:19:30 AM	Bubbler valve closed
10/19/2010	11:19:30 AM	Helium valve opened
10/19/2010	11:19:30 AM	Main Vac valve opened
10/19/2010	11:19:30 AM	Bypass valve opened
10/19/2010	11:19:30 AM	Helium MFC set to  100.000000
10/19/2010	11:19:30 AM	H2 MFC set to  0.000000
10/19/2010	11:19:30 AM	BCl3 MFC set to  0.000000
10/19/2010	11:19:30 AM	PHl3 MFC set to  0.000000
10/19/2010	11:19:30 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:19:30 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:19:30 AM	Tube furnace set to 0
10/19/2010	11:19:31 AM	Helium valve closed
10/19/2010	11:19:31 AM	H2 valve closed
10/19/2010	11:19:31 AM	BCl3 valve closed
10/19/2010	11:19:31 AM	PH3 valve closed
10/19/2010	11:19:31 AM	SiCl4 pre valve closed
10/19/2010	11:19:31 AM	SiCl4 post valve closed
10/19/2010	11:19:31 AM	Bubbler valve closed
10/19/2010	11:19:31 AM	Main Vac valve opened
10/19/2010	11:19:31 AM	Bypass valve opened
10/19/2010	11:19:31 AM	Helium MFC set to  0.000000
10/19/2010	11:19:31 AM	H2 MFC set to  0.000000
10/19/2010	11:19:31 AM	BCl3 MFC set to  0.000000
10/19/2010	11:19:31 AM	PHl3 MFC set to  0.000000
10/19/2010	11:19:31 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:19:31 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:19:31 AM	Tube furnace set to 0
10/19/2010	11:19:32 AM	H2 valve closed
10/19/2010	11:19:32 AM	BCl3 valve closed
10/19/2010	11:19:32 AM	PH3 valve closed
10/19/2010	11:19:32 AM	SiCl4 pre valve closed
10/19/2010	11:19:32 AM	SiCl4 post valve closed
10/19/2010	11:19:32 AM	Bubbler valve closed
10/19/2010	11:19:32 AM	Helium valve opened
10/19/2010	11:19:32 AM	Main Vac valve opened
10/19/2010	11:19:32 AM	Bypass valve opened
10/19/2010	11:19:32 AM	Helium MFC set to  100.000000
10/19/2010	11:19:32 AM	H2 MFC set to  0.000000
10/19/2010	11:19:32 AM	BCl3 MFC set to  0.000000
10/19/2010	11:19:32 AM	PHl3 MFC set to  0.000000
10/19/2010	11:19:32 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:19:32 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:19:32 AM	Tube furnace set to 0
10/19/2010	11:19:33 AM	Helium valve closed
10/19/2010	11:19:33 AM	H2 valve closed
10/19/2010	11:19:33 AM	BCl3 valve closed
10/19/2010	11:19:33 AM	PH3 valve closed
10/19/2010	11:19:33 AM	SiCl4 pre valve closed
10/19/2010	11:19:33 AM	SiCl4 post valve closed
10/19/2010	11:19:33 AM	Bubbler valve closed
10/19/2010	11:19:33 AM	Main Vac valve opened
10/19/2010	11:19:33 AM	Bypass valve opened
10/19/2010	11:19:33 AM	Helium MFC set to  0.000000
10/19/2010	11:19:33 AM	H2 MFC set to  0.000000
10/19/2010	11:19:33 AM	BCl3 MFC set to  0.000000
10/19/2010	11:19:33 AM	PHl3 MFC set to  0.000000
10/19/2010	11:19:33 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:19:33 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:19:33 AM	Tube furnace set to 0
10/19/2010	11:19:34 AM	Run finished at 11:19 AM
10/19/2010	11:19:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	11:28:58 AM	Recipe started at 11:28 AM
10/19/2010	11:28:59 AM	Helium valve closed
10/19/2010	11:28:59 AM	BCl3 valve closed
10/19/2010	11:28:59 AM	PH3 valve closed
10/19/2010	11:28:59 AM	SiCl4 pre valve closed
10/19/2010	11:28:59 AM	SiCl4 post valve closed
10/19/2010	11:28:59 AM	Main Vac valve closed
10/19/2010	11:28:59 AM	Bypass valve closed
10/19/2010	11:28:59 AM	Bubbler valve closed
10/19/2010	11:28:59 AM	H2 valve opened
10/19/2010	11:28:59 AM	Helium MFC set to  0.000000
10/19/2010	11:28:59 AM	H2 MFC set to  500.000000
10/19/2010	11:28:59 AM	BCl3 MFC set to  0.000000
10/19/2010	11:28:59 AM	PHl3 MFC set to  0.000000
10/19/2010	11:28:59 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:28:59 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:28:59 AM	Tube furnace set to 0
10/19/2010	11:30:22 AM	Helium valve closed
10/19/2010	11:30:22 AM	BCl3 valve closed
10/19/2010	11:30:22 AM	PH3 valve closed
10/19/2010	11:30:22 AM	SiCl4 pre valve closed
10/19/2010	11:30:22 AM	SiCl4 post valve closed
10/19/2010	11:30:22 AM	Main Vac valve closed
10/19/2010	11:30:22 AM	Bypass valve closed
10/19/2010	11:30:22 AM	H2 valve opened
10/19/2010	11:30:22 AM	Bubbler valve opened
10/19/2010	11:30:22 AM	Helium MFC set to  0.000000
10/19/2010	11:30:22 AM	H2 MFC set to  500.000000
10/19/2010	11:30:22 AM	BCl3 MFC set to  0.000000
10/19/2010	11:30:22 AM	PHl3 MFC set to  0.000000
10/19/2010	11:30:22 AM	SiCl4 MFC set to  0.000000
10/19/2010	11:30:22 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:30:22 AM	Tube furnace set to 1000
10/19/2010	11:50:22 AM	Helium valve closed
10/19/2010	11:50:22 AM	PH3 valve closed
10/19/2010	11:50:22 AM	Main Vac valve closed
10/19/2010	11:50:22 AM	Bypass valve closed
10/19/2010	11:50:22 AM	H2 valve opened
10/19/2010	11:50:22 AM	BCl3 valve opened
10/19/2010	11:50:22 AM	SiCl4 pre valve opened
10/19/2010	11:50:22 AM	SiCl4 post valve opened
10/19/2010	11:50:22 AM	Bubbler valve opened
10/19/2010	11:50:22 AM	Helium MFC set to  0.000000
10/19/2010	11:50:22 AM	H2 MFC set to  500.000000
10/19/2010	11:50:22 AM	BCl3 MFC set to  12.000000
10/19/2010	11:50:22 AM	PHl3 MFC set to  0.000000
10/19/2010	11:50:22 AM	SiCl4 MFC set to  50.000000
10/19/2010	11:50:22 AM	Bypass solenoid MFC set to  0.000000
10/19/2010	11:50:22 AM	Tube furnace set to 1000
10/19/2010	12:03:42 PM	H2 valve closed
10/19/2010	12:03:42 PM	BCl3 valve closed
10/19/2010	12:03:42 PM	PH3 valve closed
10/19/2010	12:03:42 PM	SiCl4 pre valve closed
10/19/2010	12:03:42 PM	SiCl4 post valve closed
10/19/2010	12:03:42 PM	Main Vac valve closed
10/19/2010	12:03:42 PM	Bypass valve closed
10/19/2010	12:03:42 PM	Helium valve opened
10/19/2010	12:03:42 PM	Bubbler valve opened
10/19/2010	12:03:42 PM	Helium MFC set to  500.000000
10/19/2010	12:03:42 PM	H2 MFC set to  0.000000
10/19/2010	12:03:42 PM	BCl3 MFC set to  0.000000
10/19/2010	12:03:42 PM	PHl3 MFC set to  0.000000
10/19/2010	12:03:42 PM	SiCl4 MFC set to  0.000000
10/19/2010	12:03:42 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	12:03:42 PM	Tube furnace set to 0
10/19/2010	12:23:42 PM	Helium valve closed
10/19/2010	12:23:42 PM	H2 valve closed
10/19/2010	12:23:42 PM	BCl3 valve closed
10/19/2010	12:23:42 PM	PH3 valve closed
10/19/2010	12:23:42 PM	SiCl4 pre valve closed
10/19/2010	12:23:42 PM	SiCl4 post valve closed
10/19/2010	12:23:42 PM	Main Vac valve closed
10/19/2010	12:23:42 PM	Bypass valve closed
10/19/2010	12:23:42 PM	Bubbler valve closed
10/19/2010	12:23:42 PM	Helium MFC set to  0.000000
10/19/2010	12:23:42 PM	H2 MFC set to  0.000000
10/19/2010	12:23:42 PM	BCl3 MFC set to  0.000000
10/19/2010	12:23:42 PM	PHl3 MFC set to  0.000000
10/19/2010	12:23:42 PM	SiCl4 MFC set to  0.000000
10/19/2010	12:23:42 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	12:23:43 PM	Tube furnace set to 0
10/19/2010	12:23:43 PM	Run finished at 12:23 PM
10/19/2010	1:35:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2010	1:35:38 PM	Recipe started at 1:35 PM
10/19/2010	1:35:38 PM	Helium valve closed
10/19/2010	1:35:38 PM	H2 valve closed
10/19/2010	1:35:38 PM	BCl3 valve closed
10/19/2010	1:35:38 PM	PH3 valve closed
10/19/2010	1:35:38 PM	SiCl4 pre valve closed
10/19/2010	1:35:38 PM	SiCl4 post valve closed
10/19/2010	1:35:38 PM	Main Vac valve closed
10/19/2010	1:35:38 PM	Bubbler valve closed
10/19/2010	1:35:38 PM	Bypass valve opened
10/19/2010	1:35:38 PM	Helium MFC set to  0.000000
10/19/2010	1:35:38 PM	H2 MFC set to  0.000000
10/19/2010	1:35:38 PM	BCl3 MFC set to  0.000000
10/19/2010	1:35:38 PM	PHl3 MFC set to  0.000000
10/19/2010	1:35:38 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:35:38 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:35:38 PM	Tube furnace set to 0
10/19/2010	1:36:27 PM	Helium valve closed
10/19/2010	1:36:27 PM	H2 valve closed
10/19/2010	1:36:27 PM	BCl3 valve closed
10/19/2010	1:36:27 PM	PH3 valve closed
10/19/2010	1:36:27 PM	SiCl4 pre valve closed
10/19/2010	1:36:27 PM	SiCl4 post valve closed
10/19/2010	1:36:27 PM	Bubbler valve closed
10/19/2010	1:36:27 PM	Main Vac valve opened
10/19/2010	1:36:27 PM	Bypass valve opened
10/19/2010	1:36:27 PM	Helium MFC set to  0.000000
10/19/2010	1:36:27 PM	H2 MFC set to  0.000000
10/19/2010	1:36:27 PM	BCl3 MFC set to  0.000000
10/19/2010	1:36:27 PM	PHl3 MFC set to  0.000000
10/19/2010	1:36:27 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:36:27 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:36:27 PM	Tube furnace set to 0
10/19/2010	1:36:27 PM	Run finished at 1:36 PM
10/19/2010	1:36:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2010	1:36:45 PM	Bypass valve closed
10/19/2010	1:36:46 PM	Main Vac valve closed
10/19/2010	1:36:53 PM	Main Vac valve opened
10/19/2010	1:36:53 PM	Bypass valve opened
10/19/2010	1:37:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	1:37:13 PM	Recipe started at 1:37 PM
10/19/2010	1:37:13 PM	Helium valve closed
10/19/2010	1:37:13 PM	H2 valve closed
10/19/2010	1:37:13 PM	BCl3 valve closed
10/19/2010	1:37:13 PM	PH3 valve closed
10/19/2010	1:37:13 PM	SiCl4 pre valve closed
10/19/2010	1:37:13 PM	SiCl4 post valve closed
10/19/2010	1:37:13 PM	Main Vac valve closed
10/19/2010	1:37:13 PM	Bubbler valve closed
10/19/2010	1:37:13 PM	Bypass valve opened
10/19/2010	1:37:13 PM	Helium MFC set to  0.000000
10/19/2010	1:37:13 PM	H2 MFC set to  0.000000
10/19/2010	1:37:13 PM	BCl3 MFC set to  0.000000
10/19/2010	1:37:13 PM	PHl3 MFC set to  0.000000
10/19/2010	1:37:13 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:37:13 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:37:13 PM	Tube furnace set to 0
10/19/2010	1:37:13 PM	Helium valve closed
10/19/2010	1:37:13 PM	H2 valve closed
10/19/2010	1:37:13 PM	BCl3 valve closed
10/19/2010	1:37:13 PM	PH3 valve closed
10/19/2010	1:37:13 PM	SiCl4 pre valve closed
10/19/2010	1:37:13 PM	SiCl4 post valve closed
10/19/2010	1:37:13 PM	Bubbler valve closed
10/19/2010	1:37:13 PM	Main Vac valve opened
10/19/2010	1:37:13 PM	Bypass valve opened
10/19/2010	1:37:13 PM	Helium MFC set to  0.000000
10/19/2010	1:37:13 PM	H2 MFC set to  0.000000
10/19/2010	1:37:13 PM	BCl3 MFC set to  0.000000
10/19/2010	1:37:13 PM	PHl3 MFC set to  0.000000
10/19/2010	1:37:13 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:37:13 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:37:13 PM	Tube furnace set to 0
10/19/2010	1:38:13 PM	H2 valve closed
10/19/2010	1:38:13 PM	BCl3 valve closed
10/19/2010	1:38:13 PM	PH3 valve closed
10/19/2010	1:38:13 PM	SiCl4 pre valve closed
10/19/2010	1:38:13 PM	SiCl4 post valve closed
10/19/2010	1:38:13 PM	Bubbler valve closed
10/19/2010	1:38:13 PM	Helium valve opened
10/19/2010	1:38:13 PM	Main Vac valve opened
10/19/2010	1:38:13 PM	Bypass valve opened
10/19/2010	1:38:13 PM	Helium MFC set to  100.000000
10/19/2010	1:38:13 PM	H2 MFC set to  0.000000
10/19/2010	1:38:13 PM	BCl3 MFC set to  0.000000
10/19/2010	1:38:13 PM	PHl3 MFC set to  0.000000
10/19/2010	1:38:13 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:38:13 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:38:13 PM	Tube furnace set to 0
10/19/2010	1:39:13 PM	Helium valve closed
10/19/2010	1:39:13 PM	H2 valve closed
10/19/2010	1:39:13 PM	BCl3 valve closed
10/19/2010	1:39:13 PM	PH3 valve closed
10/19/2010	1:39:13 PM	SiCl4 pre valve closed
10/19/2010	1:39:13 PM	SiCl4 post valve closed
10/19/2010	1:39:13 PM	Bubbler valve closed
10/19/2010	1:39:13 PM	Main Vac valve opened
10/19/2010	1:39:13 PM	Bypass valve opened
10/19/2010	1:39:13 PM	Helium MFC set to  0.000000
10/19/2010	1:39:13 PM	H2 MFC set to  0.000000
10/19/2010	1:39:14 PM	BCl3 MFC set to  0.000000
10/19/2010	1:39:14 PM	PHl3 MFC set to  0.000000
10/19/2010	1:39:14 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:39:14 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:39:14 PM	Tube furnace set to 0
10/19/2010	1:40:14 PM	H2 valve closed
10/19/2010	1:40:14 PM	BCl3 valve closed
10/19/2010	1:40:14 PM	PH3 valve closed
10/19/2010	1:40:14 PM	SiCl4 pre valve closed
10/19/2010	1:40:14 PM	SiCl4 post valve closed
10/19/2010	1:40:14 PM	Bubbler valve closed
10/19/2010	1:40:14 PM	Helium valve opened
10/19/2010	1:40:14 PM	Main Vac valve opened
10/19/2010	1:40:14 PM	Bypass valve opened
10/19/2010	1:40:14 PM	Helium MFC set to  100.000000
10/19/2010	1:40:14 PM	H2 MFC set to  0.000000
10/19/2010	1:40:14 PM	BCl3 MFC set to  0.000000
10/19/2010	1:40:14 PM	PHl3 MFC set to  0.000000
10/19/2010	1:40:14 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:40:14 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:40:14 PM	Tube furnace set to 0
10/19/2010	1:41:14 PM	Helium valve closed
10/19/2010	1:41:14 PM	H2 valve closed
10/19/2010	1:41:14 PM	BCl3 valve closed
10/19/2010	1:41:14 PM	PH3 valve closed
10/19/2010	1:41:14 PM	SiCl4 pre valve closed
10/19/2010	1:41:14 PM	SiCl4 post valve closed
10/19/2010	1:41:14 PM	Bubbler valve closed
10/19/2010	1:41:14 PM	Main Vac valve opened
10/19/2010	1:41:14 PM	Bypass valve opened
10/19/2010	1:41:14 PM	Helium MFC set to  0.000000
10/19/2010	1:41:14 PM	H2 MFC set to  0.000000
10/19/2010	1:41:14 PM	BCl3 MFC set to  0.000000
10/19/2010	1:41:14 PM	PHl3 MFC set to  0.000000
10/19/2010	1:41:14 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:41:14 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:41:14 PM	Tube furnace set to 0
10/19/2010	1:42:14 PM	H2 valve closed
10/19/2010	1:42:14 PM	BCl3 valve closed
10/19/2010	1:42:14 PM	PH3 valve closed
10/19/2010	1:42:14 PM	SiCl4 pre valve closed
10/19/2010	1:42:14 PM	SiCl4 post valve closed
10/19/2010	1:42:14 PM	Bubbler valve closed
10/19/2010	1:42:14 PM	Helium valve opened
10/19/2010	1:42:14 PM	Main Vac valve opened
10/19/2010	1:42:14 PM	Bypass valve opened
10/19/2010	1:42:14 PM	Helium MFC set to  100.000000
10/19/2010	1:42:14 PM	H2 MFC set to  0.000000
10/19/2010	1:42:14 PM	BCl3 MFC set to  0.000000
10/19/2010	1:42:14 PM	PHl3 MFC set to  0.000000
10/19/2010	1:42:14 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:42:14 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:42:14 PM	Tube furnace set to 0
10/19/2010	1:43:14 PM	Helium valve closed
10/19/2010	1:43:14 PM	H2 valve closed
10/19/2010	1:43:14 PM	BCl3 valve closed
10/19/2010	1:43:14 PM	PH3 valve closed
10/19/2010	1:43:14 PM	SiCl4 pre valve closed
10/19/2010	1:43:14 PM	SiCl4 post valve closed
10/19/2010	1:43:14 PM	Bubbler valve closed
10/19/2010	1:43:14 PM	Main Vac valve opened
10/19/2010	1:43:14 PM	Bypass valve opened
10/19/2010	1:43:14 PM	Helium MFC set to  0.000000
10/19/2010	1:43:14 PM	H2 MFC set to  0.000000
10/19/2010	1:43:14 PM	BCl3 MFC set to  0.000000
10/19/2010	1:43:14 PM	PHl3 MFC set to  0.000000
10/19/2010	1:43:14 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:43:14 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:43:14 PM	Tube furnace set to 0
10/19/2010	1:44:10 PM	Run aborted at 1:44 PM
10/19/2010	1:44:10 PM	Helium valve closed
10/19/2010	1:44:10 PM	H2 valve closed
10/19/2010	1:44:10 PM	BCl3 valve closed
10/19/2010	1:44:10 PM	PH3 valve closed
10/19/2010	1:44:10 PM	SiCl4 pre valve closed
10/19/2010	1:44:10 PM	SiCl4 post valve closed
10/19/2010	1:44:10 PM	Bypass valve closed
10/19/2010	1:44:10 PM	Main Vac valve closed
10/19/2010	1:44:10 PM	Bubbler valve closed
10/19/2010	1:44:10 PM	Helium MFC set to  0.000000
10/19/2010	1:44:10 PM	H2 MFC set to  0.000000
10/19/2010	1:44:10 PM	BCl3 MFC set to  0.000000
10/19/2010	1:44:10 PM	PHl3 MFC set to  0.000000
10/19/2010	1:44:10 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:44:10 PM	Tube furnace set to 0
10/19/2010	1:44:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	1:44:12 PM	Bypass valve opened
10/19/2010	1:44:13 PM	Main Vac valve opened
10/19/2010	1:44:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	1:44:27 PM	Recipe started at 1:44 PM
10/19/2010	1:44:27 PM	Helium valve closed
10/19/2010	1:44:27 PM	H2 valve closed
10/19/2010	1:44:27 PM	BCl3 valve closed
10/19/2010	1:44:27 PM	PH3 valve closed
10/19/2010	1:44:27 PM	SiCl4 pre valve closed
10/19/2010	1:44:27 PM	SiCl4 post valve closed
10/19/2010	1:44:27 PM	Main Vac valve closed
10/19/2010	1:44:27 PM	Bubbler valve closed
10/19/2010	1:44:27 PM	Bypass valve opened
10/19/2010	1:44:27 PM	Helium MFC set to  0.000000
10/19/2010	1:44:27 PM	H2 MFC set to  0.000000
10/19/2010	1:44:27 PM	BCl3 MFC set to  0.000000
10/19/2010	1:44:27 PM	PHl3 MFC set to  0.000000
10/19/2010	1:44:27 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:44:27 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:44:27 PM	Tube furnace set to 0
10/19/2010	1:44:27 PM	Helium valve closed
10/19/2010	1:44:27 PM	H2 valve closed
10/19/2010	1:44:27 PM	BCl3 valve closed
10/19/2010	1:44:27 PM	PH3 valve closed
10/19/2010	1:44:27 PM	SiCl4 pre valve closed
10/19/2010	1:44:27 PM	SiCl4 post valve closed
10/19/2010	1:44:27 PM	Bubbler valve closed
10/19/2010	1:44:27 PM	Main Vac valve opened
10/19/2010	1:44:27 PM	Bypass valve opened
10/19/2010	1:44:27 PM	Helium MFC set to  0.000000
10/19/2010	1:44:27 PM	H2 MFC set to  0.000000
10/19/2010	1:44:27 PM	BCl3 MFC set to  0.000000
10/19/2010	1:44:27 PM	PHl3 MFC set to  0.000000
10/19/2010	1:44:27 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:44:27 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:44:27 PM	Tube furnace set to 0
10/19/2010	1:45:27 PM	H2 valve closed
10/19/2010	1:45:27 PM	BCl3 valve closed
10/19/2010	1:45:27 PM	PH3 valve closed
10/19/2010	1:45:27 PM	SiCl4 pre valve closed
10/19/2010	1:45:27 PM	SiCl4 post valve closed
10/19/2010	1:45:27 PM	Bubbler valve closed
10/19/2010	1:45:27 PM	Helium valve opened
10/19/2010	1:45:27 PM	Main Vac valve opened
10/19/2010	1:45:27 PM	Bypass valve opened
10/19/2010	1:45:27 PM	Helium MFC set to  100.000000
10/19/2010	1:45:27 PM	H2 MFC set to  0.000000
10/19/2010	1:45:27 PM	BCl3 MFC set to  0.000000
10/19/2010	1:45:27 PM	PHl3 MFC set to  0.000000
10/19/2010	1:45:27 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:45:27 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:45:28 PM	Tube furnace set to 0
10/19/2010	1:46:28 PM	Helium valve closed
10/19/2010	1:46:28 PM	H2 valve closed
10/19/2010	1:46:28 PM	BCl3 valve closed
10/19/2010	1:46:28 PM	PH3 valve closed
10/19/2010	1:46:28 PM	SiCl4 pre valve closed
10/19/2010	1:46:28 PM	SiCl4 post valve closed
10/19/2010	1:46:28 PM	Bubbler valve closed
10/19/2010	1:46:28 PM	Main Vac valve opened
10/19/2010	1:46:28 PM	Bypass valve opened
10/19/2010	1:46:28 PM	Helium MFC set to  0.000000
10/19/2010	1:46:28 PM	H2 MFC set to  0.000000
10/19/2010	1:46:28 PM	BCl3 MFC set to  0.000000
10/19/2010	1:46:28 PM	PHl3 MFC set to  0.000000
10/19/2010	1:46:28 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:46:28 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:46:28 PM	Tube furnace set to 0
10/19/2010	1:47:28 PM	H2 valve closed
10/19/2010	1:47:28 PM	BCl3 valve closed
10/19/2010	1:47:28 PM	PH3 valve closed
10/19/2010	1:47:28 PM	SiCl4 pre valve closed
10/19/2010	1:47:28 PM	SiCl4 post valve closed
10/19/2010	1:47:28 PM	Bubbler valve closed
10/19/2010	1:47:28 PM	Helium valve opened
10/19/2010	1:47:28 PM	Main Vac valve opened
10/19/2010	1:47:28 PM	Bypass valve opened
10/19/2010	1:47:28 PM	Helium MFC set to  100.000000
10/19/2010	1:47:28 PM	H2 MFC set to  0.000000
10/19/2010	1:47:28 PM	BCl3 MFC set to  0.000000
10/19/2010	1:47:28 PM	PHl3 MFC set to  0.000000
10/19/2010	1:47:28 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:47:28 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:47:28 PM	Tube furnace set to 0
10/19/2010	1:48:28 PM	Helium valve closed
10/19/2010	1:48:28 PM	H2 valve closed
10/19/2010	1:48:28 PM	BCl3 valve closed
10/19/2010	1:48:28 PM	PH3 valve closed
10/19/2010	1:48:28 PM	SiCl4 pre valve closed
10/19/2010	1:48:28 PM	SiCl4 post valve closed
10/19/2010	1:48:28 PM	Bubbler valve closed
10/19/2010	1:48:28 PM	Main Vac valve opened
10/19/2010	1:48:28 PM	Bypass valve opened
10/19/2010	1:48:28 PM	Helium MFC set to  0.000000
10/19/2010	1:48:28 PM	H2 MFC set to  0.000000
10/19/2010	1:48:28 PM	BCl3 MFC set to  0.000000
10/19/2010	1:48:28 PM	PHl3 MFC set to  0.000000
10/19/2010	1:48:28 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:48:28 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:48:28 PM	Tube furnace set to 0
10/19/2010	1:49:28 PM	H2 valve closed
10/19/2010	1:49:28 PM	BCl3 valve closed
10/19/2010	1:49:28 PM	PH3 valve closed
10/19/2010	1:49:28 PM	SiCl4 pre valve closed
10/19/2010	1:49:28 PM	SiCl4 post valve closed
10/19/2010	1:49:28 PM	Bubbler valve closed
10/19/2010	1:49:28 PM	Helium valve opened
10/19/2010	1:49:28 PM	Main Vac valve opened
10/19/2010	1:49:28 PM	Bypass valve opened
10/19/2010	1:49:28 PM	Helium MFC set to  100.000000
10/19/2010	1:49:28 PM	H2 MFC set to  0.000000
10/19/2010	1:49:28 PM	BCl3 MFC set to  0.000000
10/19/2010	1:49:28 PM	PHl3 MFC set to  0.000000
10/19/2010	1:49:28 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:49:28 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:49:28 PM	Tube furnace set to 0
10/19/2010	1:50:28 PM	Helium valve closed
10/19/2010	1:50:28 PM	H2 valve closed
10/19/2010	1:50:28 PM	BCl3 valve closed
10/19/2010	1:50:28 PM	PH3 valve closed
10/19/2010	1:50:28 PM	SiCl4 pre valve closed
10/19/2010	1:50:28 PM	SiCl4 post valve closed
10/19/2010	1:50:28 PM	Bubbler valve closed
10/19/2010	1:50:28 PM	Main Vac valve opened
10/19/2010	1:50:28 PM	Bypass valve opened
10/19/2010	1:50:28 PM	Helium MFC set to  0.000000
10/19/2010	1:50:28 PM	H2 MFC set to  0.000000
10/19/2010	1:50:28 PM	BCl3 MFC set to  0.000000
10/19/2010	1:50:28 PM	PHl3 MFC set to  0.000000
10/19/2010	1:50:28 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:50:28 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:50:29 PM	Tube furnace set to 0
10/19/2010	1:51:29 PM	H2 valve closed
10/19/2010	1:51:29 PM	BCl3 valve closed
10/19/2010	1:51:29 PM	PH3 valve closed
10/19/2010	1:51:29 PM	SiCl4 pre valve closed
10/19/2010	1:51:29 PM	SiCl4 post valve closed
10/19/2010	1:51:29 PM	Bubbler valve closed
10/19/2010	1:51:29 PM	Helium valve opened
10/19/2010	1:51:29 PM	Main Vac valve opened
10/19/2010	1:51:29 PM	Bypass valve opened
10/19/2010	1:51:29 PM	Helium MFC set to  100.000000
10/19/2010	1:51:29 PM	H2 MFC set to  0.000000
10/19/2010	1:51:29 PM	BCl3 MFC set to  0.000000
10/19/2010	1:51:29 PM	PHl3 MFC set to  0.000000
10/19/2010	1:51:29 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:51:29 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:51:29 PM	Tube furnace set to 0
10/19/2010	1:52:29 PM	Helium valve closed
10/19/2010	1:52:29 PM	H2 valve closed
10/19/2010	1:52:29 PM	BCl3 valve closed
10/19/2010	1:52:29 PM	PH3 valve closed
10/19/2010	1:52:29 PM	SiCl4 pre valve closed
10/19/2010	1:52:29 PM	SiCl4 post valve closed
10/19/2010	1:52:29 PM	Bubbler valve closed
10/19/2010	1:52:29 PM	Main Vac valve opened
10/19/2010	1:52:29 PM	Bypass valve opened
10/19/2010	1:52:29 PM	Helium MFC set to  0.000000
10/19/2010	1:52:29 PM	H2 MFC set to  0.000000
10/19/2010	1:52:29 PM	BCl3 MFC set to  0.000000
10/19/2010	1:52:29 PM	PHl3 MFC set to  0.000000
10/19/2010	1:52:29 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:52:29 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:52:29 PM	Tube furnace set to 0
10/19/2010	1:53:29 PM	H2 valve closed
10/19/2010	1:53:29 PM	BCl3 valve closed
10/19/2010	1:53:29 PM	PH3 valve closed
10/19/2010	1:53:29 PM	SiCl4 pre valve closed
10/19/2010	1:53:29 PM	SiCl4 post valve closed
10/19/2010	1:53:29 PM	Bubbler valve closed
10/19/2010	1:53:29 PM	Helium valve opened
10/19/2010	1:53:29 PM	Main Vac valve opened
10/19/2010	1:53:29 PM	Bypass valve opened
10/19/2010	1:53:29 PM	Helium MFC set to  100.000000
10/19/2010	1:53:29 PM	H2 MFC set to  0.000000
10/19/2010	1:53:29 PM	BCl3 MFC set to  0.000000
10/19/2010	1:53:29 PM	PHl3 MFC set to  0.000000
10/19/2010	1:53:29 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:53:29 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:53:29 PM	Tube furnace set to 0
10/19/2010	1:54:29 PM	Helium valve closed
10/19/2010	1:54:29 PM	H2 valve closed
10/19/2010	1:54:29 PM	BCl3 valve closed
10/19/2010	1:54:29 PM	PH3 valve closed
10/19/2010	1:54:29 PM	SiCl4 pre valve closed
10/19/2010	1:54:29 PM	SiCl4 post valve closed
10/19/2010	1:54:29 PM	Bubbler valve closed
10/19/2010	1:54:29 PM	Main Vac valve opened
10/19/2010	1:54:29 PM	Bypass valve opened
10/19/2010	1:54:29 PM	Helium MFC set to  0.000000
10/19/2010	1:54:29 PM	H2 MFC set to  0.000000
10/19/2010	1:54:29 PM	BCl3 MFC set to  0.000000
10/19/2010	1:54:29 PM	PHl3 MFC set to  0.000000
10/19/2010	1:54:29 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:54:29 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:54:29 PM	Tube furnace set to 0
10/19/2010	1:55:29 PM	H2 valve closed
10/19/2010	1:55:29 PM	BCl3 valve closed
10/19/2010	1:55:29 PM	PH3 valve closed
10/19/2010	1:55:29 PM	SiCl4 pre valve closed
10/19/2010	1:55:29 PM	SiCl4 post valve closed
10/19/2010	1:55:29 PM	Bubbler valve closed
10/19/2010	1:55:29 PM	Helium valve opened
10/19/2010	1:55:29 PM	Main Vac valve opened
10/19/2010	1:55:29 PM	Bypass valve opened
10/19/2010	1:55:29 PM	Helium MFC set to  100.000000
10/19/2010	1:55:29 PM	H2 MFC set to  0.000000
10/19/2010	1:55:29 PM	BCl3 MFC set to  0.000000
10/19/2010	1:55:29 PM	PHl3 MFC set to  0.000000
10/19/2010	1:55:29 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:55:29 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:55:30 PM	Tube furnace set to 0
10/19/2010	1:56:30 PM	Helium valve closed
10/19/2010	1:56:30 PM	H2 valve closed
10/19/2010	1:56:30 PM	BCl3 valve closed
10/19/2010	1:56:30 PM	PH3 valve closed
10/19/2010	1:56:30 PM	SiCl4 pre valve closed
10/19/2010	1:56:30 PM	SiCl4 post valve closed
10/19/2010	1:56:30 PM	Bubbler valve closed
10/19/2010	1:56:30 PM	Main Vac valve opened
10/19/2010	1:56:30 PM	Bypass valve opened
10/19/2010	1:56:30 PM	Helium MFC set to  0.000000
10/19/2010	1:56:30 PM	H2 MFC set to  0.000000
10/19/2010	1:56:30 PM	BCl3 MFC set to  0.000000
10/19/2010	1:56:30 PM	PHl3 MFC set to  0.000000
10/19/2010	1:56:30 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:56:30 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:56:30 PM	Tube furnace set to 0
10/19/2010	1:57:30 PM	H2 valve closed
10/19/2010	1:57:30 PM	BCl3 valve closed
10/19/2010	1:57:30 PM	PH3 valve closed
10/19/2010	1:57:30 PM	SiCl4 pre valve closed
10/19/2010	1:57:30 PM	SiCl4 post valve closed
10/19/2010	1:57:30 PM	Bubbler valve closed
10/19/2010	1:57:30 PM	Helium valve opened
10/19/2010	1:57:30 PM	Main Vac valve opened
10/19/2010	1:57:30 PM	Bypass valve opened
10/19/2010	1:57:30 PM	Helium MFC set to  100.000000
10/19/2010	1:57:30 PM	H2 MFC set to  0.000000
10/19/2010	1:57:30 PM	BCl3 MFC set to  0.000000
10/19/2010	1:57:30 PM	PHl3 MFC set to  0.000000
10/19/2010	1:57:30 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:57:30 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:57:30 PM	Tube furnace set to 0
10/19/2010	1:58:30 PM	Helium valve closed
10/19/2010	1:58:30 PM	H2 valve closed
10/19/2010	1:58:30 PM	BCl3 valve closed
10/19/2010	1:58:30 PM	PH3 valve closed
10/19/2010	1:58:30 PM	SiCl4 pre valve closed
10/19/2010	1:58:30 PM	SiCl4 post valve closed
10/19/2010	1:58:30 PM	Bubbler valve closed
10/19/2010	1:58:30 PM	Main Vac valve opened
10/19/2010	1:58:30 PM	Bypass valve opened
10/19/2010	1:58:30 PM	Helium MFC set to  0.000000
10/19/2010	1:58:30 PM	H2 MFC set to  0.000000
10/19/2010	1:58:30 PM	BCl3 MFC set to  0.000000
10/19/2010	1:58:30 PM	PHl3 MFC set to  0.000000
10/19/2010	1:58:30 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:58:30 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:58:30 PM	Tube furnace set to 0
10/19/2010	1:59:30 PM	H2 valve closed
10/19/2010	1:59:30 PM	BCl3 valve closed
10/19/2010	1:59:30 PM	PH3 valve closed
10/19/2010	1:59:30 PM	SiCl4 pre valve closed
10/19/2010	1:59:30 PM	SiCl4 post valve closed
10/19/2010	1:59:30 PM	Bubbler valve closed
10/19/2010	1:59:30 PM	Helium valve opened
10/19/2010	1:59:30 PM	Main Vac valve opened
10/19/2010	1:59:30 PM	Bypass valve opened
10/19/2010	1:59:30 PM	Helium MFC set to  100.000000
10/19/2010	1:59:30 PM	H2 MFC set to  0.000000
10/19/2010	1:59:30 PM	BCl3 MFC set to  0.000000
10/19/2010	1:59:30 PM	PHl3 MFC set to  0.000000
10/19/2010	1:59:30 PM	SiCl4 MFC set to  0.000000
10/19/2010	1:59:30 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	1:59:30 PM	Tube furnace set to 0
10/19/2010	2:00:30 PM	Helium valve closed
10/19/2010	2:00:30 PM	H2 valve closed
10/19/2010	2:00:30 PM	BCl3 valve closed
10/19/2010	2:00:30 PM	PH3 valve closed
10/19/2010	2:00:30 PM	SiCl4 pre valve closed
10/19/2010	2:00:30 PM	SiCl4 post valve closed
10/19/2010	2:00:30 PM	Bubbler valve closed
10/19/2010	2:00:30 PM	Main Vac valve opened
10/19/2010	2:00:30 PM	Bypass valve opened
10/19/2010	2:00:30 PM	Helium MFC set to  0.000000
10/19/2010	2:00:30 PM	H2 MFC set to  0.000000
10/19/2010	2:00:30 PM	BCl3 MFC set to  0.000000
10/19/2010	2:00:30 PM	PHl3 MFC set to  0.000000
10/19/2010	2:00:30 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:00:30 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:00:31 PM	Tube furnace set to 0
10/19/2010	2:01:31 PM	H2 valve closed
10/19/2010	2:01:31 PM	BCl3 valve closed
10/19/2010	2:01:31 PM	PH3 valve closed
10/19/2010	2:01:31 PM	SiCl4 pre valve closed
10/19/2010	2:01:31 PM	SiCl4 post valve closed
10/19/2010	2:01:31 PM	Bubbler valve closed
10/19/2010	2:01:31 PM	Helium valve opened
10/19/2010	2:01:31 PM	Main Vac valve opened
10/19/2010	2:01:31 PM	Bypass valve opened
10/19/2010	2:01:31 PM	Helium MFC set to  100.000000
10/19/2010	2:01:31 PM	H2 MFC set to  0.000000
10/19/2010	2:01:31 PM	BCl3 MFC set to  0.000000
10/19/2010	2:01:31 PM	PHl3 MFC set to  0.000000
10/19/2010	2:01:31 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:01:31 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:01:31 PM	Tube furnace set to 0
10/19/2010	2:02:31 PM	Helium valve closed
10/19/2010	2:02:31 PM	H2 valve closed
10/19/2010	2:02:31 PM	BCl3 valve closed
10/19/2010	2:02:31 PM	PH3 valve closed
10/19/2010	2:02:31 PM	SiCl4 pre valve closed
10/19/2010	2:02:31 PM	SiCl4 post valve closed
10/19/2010	2:02:31 PM	Bubbler valve closed
10/19/2010	2:02:31 PM	Main Vac valve opened
10/19/2010	2:02:31 PM	Bypass valve opened
10/19/2010	2:02:31 PM	Helium MFC set to  0.000000
10/19/2010	2:02:31 PM	H2 MFC set to  0.000000
10/19/2010	2:02:31 PM	BCl3 MFC set to  0.000000
10/19/2010	2:02:31 PM	PHl3 MFC set to  0.000000
10/19/2010	2:02:31 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:02:31 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:02:31 PM	Tube furnace set to 0
10/19/2010	2:03:31 PM	H2 valve closed
10/19/2010	2:03:31 PM	BCl3 valve closed
10/19/2010	2:03:31 PM	PH3 valve closed
10/19/2010	2:03:31 PM	SiCl4 pre valve closed
10/19/2010	2:03:31 PM	SiCl4 post valve closed
10/19/2010	2:03:31 PM	Bubbler valve closed
10/19/2010	2:03:31 PM	Helium valve opened
10/19/2010	2:03:31 PM	Main Vac valve opened
10/19/2010	2:03:31 PM	Bypass valve opened
10/19/2010	2:03:31 PM	Helium MFC set to  100.000000
10/19/2010	2:03:31 PM	H2 MFC set to  0.000000
10/19/2010	2:03:31 PM	BCl3 MFC set to  0.000000
10/19/2010	2:03:31 PM	PHl3 MFC set to  0.000000
10/19/2010	2:03:31 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:03:31 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:03:31 PM	Tube furnace set to 0
10/19/2010	2:04:31 PM	Helium valve closed
10/19/2010	2:04:31 PM	H2 valve closed
10/19/2010	2:04:31 PM	BCl3 valve closed
10/19/2010	2:04:31 PM	PH3 valve closed
10/19/2010	2:04:31 PM	SiCl4 pre valve closed
10/19/2010	2:04:31 PM	SiCl4 post valve closed
10/19/2010	2:04:31 PM	Bubbler valve closed
10/19/2010	2:04:31 PM	Main Vac valve opened
10/19/2010	2:04:31 PM	Bypass valve opened
10/19/2010	2:04:31 PM	Helium MFC set to  0.000000
10/19/2010	2:04:31 PM	H2 MFC set to  0.000000
10/19/2010	2:04:31 PM	BCl3 MFC set to  0.000000
10/19/2010	2:04:31 PM	PHl3 MFC set to  0.000000
10/19/2010	2:04:31 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:04:31 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:04:31 PM	Tube furnace set to 0
10/19/2010	2:04:32 PM	Run finished at 2:04 PM
10/19/2010	2:04:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	2:08:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	2:08:16 PM	Recipe started at 2:08 PM
10/19/2010	2:08:16 PM	Helium valve closed
10/19/2010	2:08:16 PM	H2 valve closed
10/19/2010	2:08:16 PM	BCl3 valve closed
10/19/2010	2:08:16 PM	PH3 valve closed
10/19/2010	2:08:16 PM	SiCl4 pre valve closed
10/19/2010	2:08:16 PM	SiCl4 post valve closed
10/19/2010	2:08:16 PM	Main Vac valve closed
10/19/2010	2:08:16 PM	Bubbler valve closed
10/19/2010	2:08:16 PM	Bypass valve opened
10/19/2010	2:08:16 PM	Helium MFC set to  0.000000
10/19/2010	2:08:16 PM	H2 MFC set to  0.000000
10/19/2010	2:08:16 PM	BCl3 MFC set to  0.000000
10/19/2010	2:08:16 PM	PHl3 MFC set to  0.000000
10/19/2010	2:08:16 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:08:16 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:08:16 PM	Tube furnace set to 0
10/19/2010	2:08:16 PM	Helium valve closed
10/19/2010	2:08:16 PM	H2 valve closed
10/19/2010	2:08:16 PM	BCl3 valve closed
10/19/2010	2:08:16 PM	PH3 valve closed
10/19/2010	2:08:16 PM	SiCl4 pre valve closed
10/19/2010	2:08:16 PM	SiCl4 post valve closed
10/19/2010	2:08:16 PM	Bubbler valve closed
10/19/2010	2:08:16 PM	Main Vac valve opened
10/19/2010	2:08:16 PM	Bypass valve opened
10/19/2010	2:08:16 PM	Helium MFC set to  0.000000
10/19/2010	2:08:16 PM	H2 MFC set to  0.000000
10/19/2010	2:08:16 PM	BCl3 MFC set to  0.000000
10/19/2010	2:08:16 PM	PHl3 MFC set to  0.000000
10/19/2010	2:08:16 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:08:16 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:08:16 PM	Tube furnace set to 0
10/19/2010	2:09:16 PM	H2 valve closed
10/19/2010	2:09:16 PM	BCl3 valve closed
10/19/2010	2:09:16 PM	PH3 valve closed
10/19/2010	2:09:16 PM	SiCl4 pre valve closed
10/19/2010	2:09:16 PM	SiCl4 post valve closed
10/19/2010	2:09:16 PM	Bubbler valve closed
10/19/2010	2:09:16 PM	Helium valve opened
10/19/2010	2:09:16 PM	Main Vac valve opened
10/19/2010	2:09:16 PM	Bypass valve opened
10/19/2010	2:09:16 PM	Helium MFC set to  100.000000
10/19/2010	2:09:16 PM	H2 MFC set to  0.000000
10/19/2010	2:09:16 PM	BCl3 MFC set to  0.000000
10/19/2010	2:09:16 PM	PHl3 MFC set to  0.000000
10/19/2010	2:09:16 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:09:16 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:09:17 PM	Tube furnace set to 0
10/19/2010	2:10:17 PM	Helium valve closed
10/19/2010	2:10:17 PM	H2 valve closed
10/19/2010	2:10:17 PM	BCl3 valve closed
10/19/2010	2:10:17 PM	PH3 valve closed
10/19/2010	2:10:17 PM	SiCl4 pre valve closed
10/19/2010	2:10:17 PM	SiCl4 post valve closed
10/19/2010	2:10:17 PM	Bubbler valve closed
10/19/2010	2:10:17 PM	Main Vac valve opened
10/19/2010	2:10:17 PM	Bypass valve opened
10/19/2010	2:10:17 PM	Helium MFC set to  0.000000
10/19/2010	2:10:17 PM	H2 MFC set to  0.000000
10/19/2010	2:10:17 PM	BCl3 MFC set to  0.000000
10/19/2010	2:10:17 PM	PHl3 MFC set to  0.000000
10/19/2010	2:10:17 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:10:17 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:10:17 PM	Tube furnace set to 0
10/19/2010	2:11:17 PM	H2 valve closed
10/19/2010	2:11:17 PM	BCl3 valve closed
10/19/2010	2:11:17 PM	PH3 valve closed
10/19/2010	2:11:17 PM	SiCl4 pre valve closed
10/19/2010	2:11:17 PM	SiCl4 post valve closed
10/19/2010	2:11:17 PM	Bubbler valve closed
10/19/2010	2:11:17 PM	Helium valve opened
10/19/2010	2:11:17 PM	Main Vac valve opened
10/19/2010	2:11:17 PM	Bypass valve opened
10/19/2010	2:11:17 PM	Helium MFC set to  100.000000
10/19/2010	2:11:17 PM	H2 MFC set to  0.000000
10/19/2010	2:11:17 PM	BCl3 MFC set to  0.000000
10/19/2010	2:11:17 PM	PHl3 MFC set to  0.000000
10/19/2010	2:11:17 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:11:17 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:11:17 PM	Tube furnace set to 0
10/19/2010	2:12:17 PM	Helium valve closed
10/19/2010	2:12:17 PM	H2 valve closed
10/19/2010	2:12:17 PM	BCl3 valve closed
10/19/2010	2:12:17 PM	PH3 valve closed
10/19/2010	2:12:17 PM	SiCl4 pre valve closed
10/19/2010	2:12:17 PM	SiCl4 post valve closed
10/19/2010	2:12:17 PM	Bubbler valve closed
10/19/2010	2:12:17 PM	Main Vac valve opened
10/19/2010	2:12:17 PM	Bypass valve opened
10/19/2010	2:12:17 PM	Helium MFC set to  0.000000
10/19/2010	2:12:17 PM	H2 MFC set to  0.000000
10/19/2010	2:12:17 PM	BCl3 MFC set to  0.000000
10/19/2010	2:12:17 PM	PHl3 MFC set to  0.000000
10/19/2010	2:12:17 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:12:17 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:12:17 PM	Tube furnace set to 0
10/19/2010	2:13:17 PM	H2 valve closed
10/19/2010	2:13:17 PM	BCl3 valve closed
10/19/2010	2:13:17 PM	PH3 valve closed
10/19/2010	2:13:17 PM	SiCl4 pre valve closed
10/19/2010	2:13:17 PM	SiCl4 post valve closed
10/19/2010	2:13:17 PM	Bubbler valve closed
10/19/2010	2:13:17 PM	Helium valve opened
10/19/2010	2:13:17 PM	Main Vac valve opened
10/19/2010	2:13:17 PM	Bypass valve opened
10/19/2010	2:13:17 PM	Helium MFC set to  100.000000
10/19/2010	2:13:17 PM	H2 MFC set to  0.000000
10/19/2010	2:13:17 PM	BCl3 MFC set to  0.000000
10/19/2010	2:13:17 PM	PHl3 MFC set to  0.000000
10/19/2010	2:13:17 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:13:17 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:13:17 PM	Tube furnace set to 0
10/19/2010	2:14:17 PM	Helium valve closed
10/19/2010	2:14:17 PM	H2 valve closed
10/19/2010	2:14:17 PM	BCl3 valve closed
10/19/2010	2:14:17 PM	PH3 valve closed
10/19/2010	2:14:17 PM	SiCl4 pre valve closed
10/19/2010	2:14:17 PM	SiCl4 post valve closed
10/19/2010	2:14:17 PM	Bubbler valve closed
10/19/2010	2:14:17 PM	Main Vac valve opened
10/19/2010	2:14:17 PM	Bypass valve opened
10/19/2010	2:14:17 PM	Helium MFC set to  0.000000
10/19/2010	2:14:17 PM	H2 MFC set to  0.000000
10/19/2010	2:14:17 PM	BCl3 MFC set to  0.000000
10/19/2010	2:14:17 PM	PHl3 MFC set to  0.000000
10/19/2010	2:14:17 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:14:17 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:14:17 PM	Tube furnace set to 0
10/19/2010	2:15:18 PM	H2 valve closed
10/19/2010	2:15:18 PM	BCl3 valve closed
10/19/2010	2:15:18 PM	PH3 valve closed
10/19/2010	2:15:18 PM	SiCl4 pre valve closed
10/19/2010	2:15:18 PM	SiCl4 post valve closed
10/19/2010	2:15:18 PM	Bubbler valve closed
10/19/2010	2:15:18 PM	Helium valve opened
10/19/2010	2:15:18 PM	Main Vac valve opened
10/19/2010	2:15:18 PM	Bypass valve opened
10/19/2010	2:15:18 PM	Helium MFC set to  100.000000
10/19/2010	2:15:18 PM	H2 MFC set to  0.000000
10/19/2010	2:15:18 PM	BCl3 MFC set to  0.000000
10/19/2010	2:15:18 PM	PHl3 MFC set to  0.000000
10/19/2010	2:15:18 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:15:18 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:15:18 PM	Tube furnace set to 0
10/19/2010	2:16:18 PM	Helium valve closed
10/19/2010	2:16:18 PM	H2 valve closed
10/19/2010	2:16:18 PM	BCl3 valve closed
10/19/2010	2:16:18 PM	PH3 valve closed
10/19/2010	2:16:18 PM	SiCl4 pre valve closed
10/19/2010	2:16:18 PM	SiCl4 post valve closed
10/19/2010	2:16:18 PM	Bubbler valve closed
10/19/2010	2:16:18 PM	Main Vac valve opened
10/19/2010	2:16:18 PM	Bypass valve opened
10/19/2010	2:16:18 PM	Helium MFC set to  0.000000
10/19/2010	2:16:18 PM	H2 MFC set to  0.000000
10/19/2010	2:16:18 PM	BCl3 MFC set to  0.000000
10/19/2010	2:16:18 PM	PHl3 MFC set to  0.000000
10/19/2010	2:16:18 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:16:18 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:16:18 PM	Tube furnace set to 0
10/19/2010	2:17:18 PM	H2 valve closed
10/19/2010	2:17:18 PM	BCl3 valve closed
10/19/2010	2:17:18 PM	PH3 valve closed
10/19/2010	2:17:18 PM	SiCl4 pre valve closed
10/19/2010	2:17:18 PM	SiCl4 post valve closed
10/19/2010	2:17:18 PM	Bubbler valve closed
10/19/2010	2:17:18 PM	Helium valve opened
10/19/2010	2:17:18 PM	Main Vac valve opened
10/19/2010	2:17:18 PM	Bypass valve opened
10/19/2010	2:17:18 PM	Helium MFC set to  100.000000
10/19/2010	2:17:18 PM	H2 MFC set to  0.000000
10/19/2010	2:17:18 PM	BCl3 MFC set to  0.000000
10/19/2010	2:17:18 PM	PHl3 MFC set to  0.000000
10/19/2010	2:17:18 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:17:18 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:17:18 PM	Tube furnace set to 0
10/19/2010	2:18:18 PM	Helium valve closed
10/19/2010	2:18:18 PM	H2 valve closed
10/19/2010	2:18:18 PM	BCl3 valve closed
10/19/2010	2:18:18 PM	PH3 valve closed
10/19/2010	2:18:18 PM	SiCl4 pre valve closed
10/19/2010	2:18:18 PM	SiCl4 post valve closed
10/19/2010	2:18:18 PM	Bubbler valve closed
10/19/2010	2:18:18 PM	Main Vac valve opened
10/19/2010	2:18:18 PM	Bypass valve opened
10/19/2010	2:18:18 PM	Helium MFC set to  0.000000
10/19/2010	2:18:18 PM	H2 MFC set to  0.000000
10/19/2010	2:18:18 PM	BCl3 MFC set to  0.000000
10/19/2010	2:18:18 PM	PHl3 MFC set to  0.000000
10/19/2010	2:18:18 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:18:18 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:18:18 PM	Tube furnace set to 0
10/19/2010	2:19:18 PM	H2 valve closed
10/19/2010	2:19:18 PM	BCl3 valve closed
10/19/2010	2:19:18 PM	PH3 valve closed
10/19/2010	2:19:18 PM	SiCl4 pre valve closed
10/19/2010	2:19:18 PM	SiCl4 post valve closed
10/19/2010	2:19:18 PM	Bubbler valve closed
10/19/2010	2:19:18 PM	Helium valve opened
10/19/2010	2:19:18 PM	Main Vac valve opened
10/19/2010	2:19:18 PM	Bypass valve opened
10/19/2010	2:19:18 PM	Helium MFC set to  100.000000
10/19/2010	2:19:18 PM	H2 MFC set to  0.000000
10/19/2010	2:19:18 PM	BCl3 MFC set to  0.000000
10/19/2010	2:19:18 PM	PHl3 MFC set to  0.000000
10/19/2010	2:19:18 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:19:18 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:19:18 PM	Tube furnace set to 0
10/19/2010	2:20:08 PM	Run aborted at 2:20 PM
10/19/2010	2:20:08 PM	Helium valve closed
10/19/2010	2:20:08 PM	H2 valve closed
10/19/2010	2:20:08 PM	BCl3 valve closed
10/19/2010	2:20:08 PM	PH3 valve closed
10/19/2010	2:20:08 PM	SiCl4 pre valve closed
10/19/2010	2:20:08 PM	SiCl4 post valve closed
10/19/2010	2:20:08 PM	Bypass valve closed
10/19/2010	2:20:08 PM	Main Vac valve closed
10/19/2010	2:20:08 PM	Bubbler valve closed
10/19/2010	2:20:09 PM	Helium MFC set to  0.000000
10/19/2010	2:20:09 PM	H2 MFC set to  0.000000
10/19/2010	2:20:09 PM	BCl3 MFC set to  0.000000
10/19/2010	2:20:09 PM	PHl3 MFC set to  0.000000
10/19/2010	2:20:09 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:20:09 PM	Tube furnace set to 0
10/19/2010	2:20:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	2:20:11 PM	Bypass valve opened
10/19/2010	2:20:11 PM	Main Vac valve opened
10/19/2010	2:27:10 PM	Recipe started at 2:27 PM
10/19/2010	2:27:10 PM	Helium valve closed
10/19/2010	2:27:10 PM	BCl3 valve closed
10/19/2010	2:27:10 PM	PH3 valve closed
10/19/2010	2:27:10 PM	SiCl4 pre valve closed
10/19/2010	2:27:10 PM	SiCl4 post valve closed
10/19/2010	2:27:10 PM	Main Vac valve closed
10/19/2010	2:27:10 PM	Bypass valve closed
10/19/2010	2:27:10 PM	Bubbler valve closed
10/19/2010	2:27:10 PM	H2 valve opened
10/19/2010	2:27:10 PM	Helium MFC set to  0.000000
10/19/2010	2:27:10 PM	H2 MFC set to  500.000000
10/19/2010	2:27:10 PM	BCl3 MFC set to  0.000000
10/19/2010	2:27:10 PM	PHl3 MFC set to  0.000000
10/19/2010	2:27:10 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:27:10 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:27:10 PM	Tube furnace set to 0
10/19/2010	2:28:30 PM	Helium valve closed
10/19/2010	2:28:30 PM	BCl3 valve closed
10/19/2010	2:28:30 PM	PH3 valve closed
10/19/2010	2:28:30 PM	SiCl4 pre valve closed
10/19/2010	2:28:30 PM	SiCl4 post valve closed
10/19/2010	2:28:30 PM	Main Vac valve closed
10/19/2010	2:28:30 PM	Bypass valve closed
10/19/2010	2:28:30 PM	H2 valve opened
10/19/2010	2:28:30 PM	Bubbler valve opened
10/19/2010	2:28:30 PM	Helium MFC set to  0.000000
10/19/2010	2:28:30 PM	H2 MFC set to  500.000000
10/19/2010	2:28:30 PM	BCl3 MFC set to  0.000000
10/19/2010	2:28:30 PM	PHl3 MFC set to  0.000000
10/19/2010	2:28:30 PM	SiCl4 MFC set to  0.000000
10/19/2010	2:28:30 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:28:30 PM	Tube furnace set to 1000
10/19/2010	2:48:30 PM	Helium valve closed
10/19/2010	2:48:30 PM	PH3 valve closed
10/19/2010	2:48:30 PM	Main Vac valve closed
10/19/2010	2:48:30 PM	Bypass valve closed
10/19/2010	2:48:30 PM	H2 valve opened
10/19/2010	2:48:30 PM	BCl3 valve opened
10/19/2010	2:48:30 PM	SiCl4 pre valve opened
10/19/2010	2:48:30 PM	SiCl4 post valve opened
10/19/2010	2:48:30 PM	Bubbler valve opened
10/19/2010	2:48:30 PM	Helium MFC set to  0.000000
10/19/2010	2:48:30 PM	H2 MFC set to  500.000000
10/19/2010	2:48:30 PM	BCl3 MFC set to  12.000000
10/19/2010	2:48:30 PM	PHl3 MFC set to  0.000000
10/19/2010	2:48:30 PM	SiCl4 MFC set to  50.000000
10/19/2010	2:48:30 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	2:48:30 PM	Tube furnace set to 1000
10/19/2010	3:01:50 PM	H2 valve closed
10/19/2010	3:01:50 PM	BCl3 valve closed
10/19/2010	3:01:50 PM	PH3 valve closed
10/19/2010	3:01:50 PM	SiCl4 pre valve closed
10/19/2010	3:01:50 PM	SiCl4 post valve closed
10/19/2010	3:01:50 PM	Main Vac valve closed
10/19/2010	3:01:50 PM	Bypass valve closed
10/19/2010	3:01:50 PM	Helium valve opened
10/19/2010	3:01:50 PM	Bubbler valve opened
10/19/2010	3:01:50 PM	Helium MFC set to  500.000000
10/19/2010	3:01:50 PM	H2 MFC set to  0.000000
10/19/2010	3:01:50 PM	BCl3 MFC set to  0.000000
10/19/2010	3:01:50 PM	PHl3 MFC set to  0.000000
10/19/2010	3:01:50 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:01:50 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:01:50 PM	Tube furnace set to 0
10/19/2010	3:21:50 PM	Helium valve closed
10/19/2010	3:21:50 PM	H2 valve closed
10/19/2010	3:21:50 PM	BCl3 valve closed
10/19/2010	3:21:50 PM	PH3 valve closed
10/19/2010	3:21:50 PM	SiCl4 pre valve closed
10/19/2010	3:21:50 PM	SiCl4 post valve closed
10/19/2010	3:21:50 PM	Main Vac valve closed
10/19/2010	3:21:50 PM	Bypass valve closed
10/19/2010	3:21:50 PM	Bubbler valve closed
10/19/2010	3:21:50 PM	Helium MFC set to  0.000000
10/19/2010	3:21:50 PM	H2 MFC set to  0.000000
10/19/2010	3:21:50 PM	BCl3 MFC set to  0.000000
10/19/2010	3:21:50 PM	PHl3 MFC set to  0.000000
10/19/2010	3:21:50 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:21:50 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:21:50 PM	Tube furnace set to 0
10/19/2010	3:21:51 PM	Run finished at 3:21 PM
10/19/2010	3:51:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2010	3:51:53 PM	Recipe started at 3:51 PM
10/19/2010	3:51:53 PM	Helium valve closed
10/19/2010	3:51:53 PM	H2 valve closed
10/19/2010	3:51:53 PM	BCl3 valve closed
10/19/2010	3:51:53 PM	PH3 valve closed
10/19/2010	3:51:53 PM	SiCl4 pre valve closed
10/19/2010	3:51:53 PM	SiCl4 post valve closed
10/19/2010	3:51:53 PM	Main Vac valve closed
10/19/2010	3:51:53 PM	Bubbler valve closed
10/19/2010	3:51:53 PM	Bypass valve opened
10/19/2010	3:51:53 PM	Helium MFC set to  0.000000
10/19/2010	3:51:53 PM	H2 MFC set to  0.000000
10/19/2010	3:51:53 PM	BCl3 MFC set to  0.000000
10/19/2010	3:51:53 PM	PHl3 MFC set to  0.000000
10/19/2010	3:51:53 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:51:53 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:51:54 PM	Tube furnace set to 0
10/19/2010	3:52:45 PM	Helium valve closed
10/19/2010	3:52:45 PM	H2 valve closed
10/19/2010	3:52:45 PM	BCl3 valve closed
10/19/2010	3:52:45 PM	PH3 valve closed
10/19/2010	3:52:45 PM	SiCl4 pre valve closed
10/19/2010	3:52:45 PM	SiCl4 post valve closed
10/19/2010	3:52:45 PM	Bubbler valve closed
10/19/2010	3:52:45 PM	Main Vac valve opened
10/19/2010	3:52:45 PM	Bypass valve opened
10/19/2010	3:52:45 PM	Helium MFC set to  0.000000
10/19/2010	3:52:45 PM	H2 MFC set to  0.000000
10/19/2010	3:52:45 PM	BCl3 MFC set to  0.000000
10/19/2010	3:52:45 PM	PHl3 MFC set to  0.000000
10/19/2010	3:52:45 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:52:45 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:52:45 PM	Tube furnace set to 0
10/19/2010	3:52:46 PM	Run finished at 3:52 PM
10/19/2010	3:52:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2010	3:53:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	3:53:55 PM	Recipe started at 3:53 PM
10/19/2010	3:53:55 PM	Helium valve closed
10/19/2010	3:53:55 PM	H2 valve closed
10/19/2010	3:53:55 PM	BCl3 valve closed
10/19/2010	3:53:55 PM	PH3 valve closed
10/19/2010	3:53:55 PM	SiCl4 pre valve closed
10/19/2010	3:53:55 PM	SiCl4 post valve closed
10/19/2010	3:53:55 PM	Main Vac valve closed
10/19/2010	3:53:55 PM	Bubbler valve closed
10/19/2010	3:53:55 PM	Bypass valve opened
10/19/2010	3:53:55 PM	Helium MFC set to  0.000000
10/19/2010	3:53:55 PM	H2 MFC set to  0.000000
10/19/2010	3:53:55 PM	BCl3 MFC set to  0.000000
10/19/2010	3:53:55 PM	PHl3 MFC set to  0.000000
10/19/2010	3:53:55 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:53:55 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:53:55 PM	Tube furnace set to 0
10/19/2010	3:53:55 PM	Helium valve closed
10/19/2010	3:53:55 PM	H2 valve closed
10/19/2010	3:53:55 PM	BCl3 valve closed
10/19/2010	3:53:55 PM	PH3 valve closed
10/19/2010	3:53:55 PM	SiCl4 pre valve closed
10/19/2010	3:53:55 PM	SiCl4 post valve closed
10/19/2010	3:53:55 PM	Bubbler valve closed
10/19/2010	3:53:55 PM	Main Vac valve opened
10/19/2010	3:53:55 PM	Bypass valve opened
10/19/2010	3:53:55 PM	Helium MFC set to  0.000000
10/19/2010	3:53:55 PM	H2 MFC set to  0.000000
10/19/2010	3:53:55 PM	BCl3 MFC set to  0.000000
10/19/2010	3:53:55 PM	PHl3 MFC set to  0.000000
10/19/2010	3:53:55 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:53:55 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:53:55 PM	Tube furnace set to 0
10/19/2010	3:54:55 PM	H2 valve closed
10/19/2010	3:54:55 PM	BCl3 valve closed
10/19/2010	3:54:55 PM	PH3 valve closed
10/19/2010	3:54:55 PM	SiCl4 pre valve closed
10/19/2010	3:54:55 PM	SiCl4 post valve closed
10/19/2010	3:54:55 PM	Bubbler valve closed
10/19/2010	3:54:55 PM	Helium valve opened
10/19/2010	3:54:55 PM	Main Vac valve opened
10/19/2010	3:54:55 PM	Bypass valve opened
10/19/2010	3:54:55 PM	Helium MFC set to  100.000000
10/19/2010	3:54:55 PM	H2 MFC set to  0.000000
10/19/2010	3:54:55 PM	BCl3 MFC set to  0.000000
10/19/2010	3:54:55 PM	PHl3 MFC set to  0.000000
10/19/2010	3:54:55 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:54:55 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:54:56 PM	Tube furnace set to 0
10/19/2010	3:55:56 PM	Helium valve closed
10/19/2010	3:55:56 PM	H2 valve closed
10/19/2010	3:55:56 PM	BCl3 valve closed
10/19/2010	3:55:56 PM	PH3 valve closed
10/19/2010	3:55:56 PM	SiCl4 pre valve closed
10/19/2010	3:55:56 PM	SiCl4 post valve closed
10/19/2010	3:55:56 PM	Bubbler valve closed
10/19/2010	3:55:56 PM	Main Vac valve opened
10/19/2010	3:55:56 PM	Bypass valve opened
10/19/2010	3:55:56 PM	Helium MFC set to  0.000000
10/19/2010	3:55:56 PM	H2 MFC set to  0.000000
10/19/2010	3:55:56 PM	BCl3 MFC set to  0.000000
10/19/2010	3:55:56 PM	PHl3 MFC set to  0.000000
10/19/2010	3:55:56 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:55:56 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:55:56 PM	Tube furnace set to 0
10/19/2010	3:56:56 PM	H2 valve closed
10/19/2010	3:56:56 PM	BCl3 valve closed
10/19/2010	3:56:56 PM	PH3 valve closed
10/19/2010	3:56:56 PM	SiCl4 pre valve closed
10/19/2010	3:56:56 PM	SiCl4 post valve closed
10/19/2010	3:56:56 PM	Bubbler valve closed
10/19/2010	3:56:56 PM	Helium valve opened
10/19/2010	3:56:56 PM	Main Vac valve opened
10/19/2010	3:56:56 PM	Bypass valve opened
10/19/2010	3:56:56 PM	Helium MFC set to  100.000000
10/19/2010	3:56:56 PM	H2 MFC set to  0.000000
10/19/2010	3:56:56 PM	BCl3 MFC set to  0.000000
10/19/2010	3:56:56 PM	PHl3 MFC set to  0.000000
10/19/2010	3:56:56 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:56:56 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:56:56 PM	Tube furnace set to 0
10/19/2010	3:57:56 PM	Helium valve closed
10/19/2010	3:57:56 PM	H2 valve closed
10/19/2010	3:57:56 PM	BCl3 valve closed
10/19/2010	3:57:56 PM	PH3 valve closed
10/19/2010	3:57:56 PM	SiCl4 pre valve closed
10/19/2010	3:57:56 PM	SiCl4 post valve closed
10/19/2010	3:57:56 PM	Bubbler valve closed
10/19/2010	3:57:56 PM	Main Vac valve opened
10/19/2010	3:57:56 PM	Bypass valve opened
10/19/2010	3:57:56 PM	Helium MFC set to  0.000000
10/19/2010	3:57:56 PM	H2 MFC set to  0.000000
10/19/2010	3:57:56 PM	BCl3 MFC set to  0.000000
10/19/2010	3:57:56 PM	PHl3 MFC set to  0.000000
10/19/2010	3:57:56 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:57:56 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:57:56 PM	Tube furnace set to 0
10/19/2010	3:58:56 PM	H2 valve closed
10/19/2010	3:58:56 PM	BCl3 valve closed
10/19/2010	3:58:56 PM	PH3 valve closed
10/19/2010	3:58:56 PM	SiCl4 pre valve closed
10/19/2010	3:58:56 PM	SiCl4 post valve closed
10/19/2010	3:58:56 PM	Bubbler valve closed
10/19/2010	3:58:56 PM	Helium valve opened
10/19/2010	3:58:56 PM	Main Vac valve opened
10/19/2010	3:58:56 PM	Bypass valve opened
10/19/2010	3:58:56 PM	Helium MFC set to  100.000000
10/19/2010	3:58:56 PM	H2 MFC set to  0.000000
10/19/2010	3:58:56 PM	BCl3 MFC set to  0.000000
10/19/2010	3:58:56 PM	PHl3 MFC set to  0.000000
10/19/2010	3:58:56 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:58:56 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:58:56 PM	Tube furnace set to 0
10/19/2010	3:59:56 PM	Helium valve closed
10/19/2010	3:59:56 PM	H2 valve closed
10/19/2010	3:59:56 PM	BCl3 valve closed
10/19/2010	3:59:56 PM	PH3 valve closed
10/19/2010	3:59:56 PM	SiCl4 pre valve closed
10/19/2010	3:59:56 PM	SiCl4 post valve closed
10/19/2010	3:59:56 PM	Bubbler valve closed
10/19/2010	3:59:56 PM	Main Vac valve opened
10/19/2010	3:59:56 PM	Bypass valve opened
10/19/2010	3:59:56 PM	Helium MFC set to  0.000000
10/19/2010	3:59:56 PM	H2 MFC set to  0.000000
10/19/2010	3:59:56 PM	BCl3 MFC set to  0.000000
10/19/2010	3:59:56 PM	PHl3 MFC set to  0.000000
10/19/2010	3:59:56 PM	SiCl4 MFC set to  0.000000
10/19/2010	3:59:56 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	3:59:56 PM	Tube furnace set to 0
10/19/2010	4:00:57 PM	H2 valve closed
10/19/2010	4:00:57 PM	BCl3 valve closed
10/19/2010	4:00:57 PM	PH3 valve closed
10/19/2010	4:00:57 PM	SiCl4 pre valve closed
10/19/2010	4:00:57 PM	SiCl4 post valve closed
10/19/2010	4:00:57 PM	Bubbler valve closed
10/19/2010	4:00:57 PM	Helium valve opened
10/19/2010	4:00:57 PM	Main Vac valve opened
10/19/2010	4:00:57 PM	Bypass valve opened
10/19/2010	4:00:57 PM	Helium MFC set to  100.000000
10/19/2010	4:00:57 PM	H2 MFC set to  0.000000
10/19/2010	4:00:57 PM	BCl3 MFC set to  0.000000
10/19/2010	4:00:57 PM	PHl3 MFC set to  0.000000
10/19/2010	4:00:57 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:00:57 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:00:57 PM	Tube furnace set to 0
10/19/2010	4:01:57 PM	Helium valve closed
10/19/2010	4:01:57 PM	H2 valve closed
10/19/2010	4:01:57 PM	BCl3 valve closed
10/19/2010	4:01:57 PM	PH3 valve closed
10/19/2010	4:01:57 PM	SiCl4 pre valve closed
10/19/2010	4:01:57 PM	SiCl4 post valve closed
10/19/2010	4:01:57 PM	Bubbler valve closed
10/19/2010	4:01:57 PM	Main Vac valve opened
10/19/2010	4:01:57 PM	Bypass valve opened
10/19/2010	4:01:57 PM	Helium MFC set to  0.000000
10/19/2010	4:01:57 PM	H2 MFC set to  0.000000
10/19/2010	4:01:57 PM	BCl3 MFC set to  0.000000
10/19/2010	4:01:57 PM	PHl3 MFC set to  0.000000
10/19/2010	4:01:57 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:01:57 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:01:57 PM	Tube furnace set to 0
10/19/2010	4:02:57 PM	H2 valve closed
10/19/2010	4:02:57 PM	BCl3 valve closed
10/19/2010	4:02:57 PM	PH3 valve closed
10/19/2010	4:02:57 PM	SiCl4 pre valve closed
10/19/2010	4:02:57 PM	SiCl4 post valve closed
10/19/2010	4:02:57 PM	Bubbler valve closed
10/19/2010	4:02:57 PM	Helium valve opened
10/19/2010	4:02:57 PM	Main Vac valve opened
10/19/2010	4:02:57 PM	Bypass valve opened
10/19/2010	4:02:57 PM	Helium MFC set to  100.000000
10/19/2010	4:02:57 PM	H2 MFC set to  0.000000
10/19/2010	4:02:57 PM	BCl3 MFC set to  0.000000
10/19/2010	4:02:57 PM	PHl3 MFC set to  0.000000
10/19/2010	4:02:57 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:02:57 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:02:57 PM	Tube furnace set to 0
10/19/2010	4:03:57 PM	Helium valve closed
10/19/2010	4:03:57 PM	H2 valve closed
10/19/2010	4:03:57 PM	BCl3 valve closed
10/19/2010	4:03:57 PM	PH3 valve closed
10/19/2010	4:03:57 PM	SiCl4 pre valve closed
10/19/2010	4:03:57 PM	SiCl4 post valve closed
10/19/2010	4:03:57 PM	Bubbler valve closed
10/19/2010	4:03:57 PM	Main Vac valve opened
10/19/2010	4:03:57 PM	Bypass valve opened
10/19/2010	4:03:57 PM	Helium MFC set to  0.000000
10/19/2010	4:03:57 PM	H2 MFC set to  0.000000
10/19/2010	4:03:57 PM	BCl3 MFC set to  0.000000
10/19/2010	4:03:57 PM	PHl3 MFC set to  0.000000
10/19/2010	4:03:57 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:03:57 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:03:57 PM	Tube furnace set to 0
10/19/2010	4:04:57 PM	H2 valve closed
10/19/2010	4:04:57 PM	BCl3 valve closed
10/19/2010	4:04:57 PM	PH3 valve closed
10/19/2010	4:04:57 PM	SiCl4 pre valve closed
10/19/2010	4:04:57 PM	SiCl4 post valve closed
10/19/2010	4:04:57 PM	Bubbler valve closed
10/19/2010	4:04:57 PM	Helium valve opened
10/19/2010	4:04:57 PM	Main Vac valve opened
10/19/2010	4:04:57 PM	Bypass valve opened
10/19/2010	4:04:57 PM	Helium MFC set to  100.000000
10/19/2010	4:04:57 PM	H2 MFC set to  0.000000
10/19/2010	4:04:57 PM	BCl3 MFC set to  0.000000
10/19/2010	4:04:57 PM	PHl3 MFC set to  0.000000
10/19/2010	4:04:57 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:04:57 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:04:57 PM	Tube furnace set to 0
10/19/2010	4:05:57 PM	Helium valve closed
10/19/2010	4:05:57 PM	H2 valve closed
10/19/2010	4:05:58 PM	BCl3 valve closed
10/19/2010	4:05:58 PM	PH3 valve closed
10/19/2010	4:05:58 PM	SiCl4 pre valve closed
10/19/2010	4:05:58 PM	SiCl4 post valve closed
10/19/2010	4:05:58 PM	Bubbler valve closed
10/19/2010	4:05:58 PM	Main Vac valve opened
10/19/2010	4:05:58 PM	Bypass valve opened
10/19/2010	4:05:58 PM	Helium MFC set to  0.000000
10/19/2010	4:05:58 PM	H2 MFC set to  0.000000
10/19/2010	4:05:58 PM	BCl3 MFC set to  0.000000
10/19/2010	4:05:58 PM	PHl3 MFC set to  0.000000
10/19/2010	4:05:58 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:05:58 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:05:58 PM	Tube furnace set to 0
10/19/2010	4:06:58 PM	H2 valve closed
10/19/2010	4:06:58 PM	BCl3 valve closed
10/19/2010	4:06:58 PM	PH3 valve closed
10/19/2010	4:06:58 PM	SiCl4 pre valve closed
10/19/2010	4:06:58 PM	SiCl4 post valve closed
10/19/2010	4:06:58 PM	Bubbler valve closed
10/19/2010	4:06:58 PM	Helium valve opened
10/19/2010	4:06:58 PM	Main Vac valve opened
10/19/2010	4:06:58 PM	Bypass valve opened
10/19/2010	4:06:58 PM	Helium MFC set to  100.000000
10/19/2010	4:06:58 PM	H2 MFC set to  0.000000
10/19/2010	4:06:58 PM	BCl3 MFC set to  0.000000
10/19/2010	4:06:58 PM	PHl3 MFC set to  0.000000
10/19/2010	4:06:58 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:06:58 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:06:58 PM	Tube furnace set to 0
10/19/2010	4:07:58 PM	Helium valve closed
10/19/2010	4:07:58 PM	H2 valve closed
10/19/2010	4:07:58 PM	BCl3 valve closed
10/19/2010	4:07:58 PM	PH3 valve closed
10/19/2010	4:07:58 PM	SiCl4 pre valve closed
10/19/2010	4:07:58 PM	SiCl4 post valve closed
10/19/2010	4:07:58 PM	Bubbler valve closed
10/19/2010	4:07:58 PM	Main Vac valve opened
10/19/2010	4:07:58 PM	Bypass valve opened
10/19/2010	4:07:58 PM	Helium MFC set to  0.000000
10/19/2010	4:07:58 PM	H2 MFC set to  0.000000
10/19/2010	4:07:58 PM	BCl3 MFC set to  0.000000
10/19/2010	4:07:58 PM	PHl3 MFC set to  0.000000
10/19/2010	4:07:58 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:07:58 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:07:58 PM	Tube furnace set to 0
10/19/2010	4:08:58 PM	H2 valve closed
10/19/2010	4:08:58 PM	BCl3 valve closed
10/19/2010	4:08:58 PM	PH3 valve closed
10/19/2010	4:08:58 PM	SiCl4 pre valve closed
10/19/2010	4:08:58 PM	SiCl4 post valve closed
10/19/2010	4:08:58 PM	Bubbler valve closed
10/19/2010	4:08:58 PM	Helium valve opened
10/19/2010	4:08:58 PM	Main Vac valve opened
10/19/2010	4:08:58 PM	Bypass valve opened
10/19/2010	4:08:58 PM	Helium MFC set to  100.000000
10/19/2010	4:08:58 PM	H2 MFC set to  0.000000
10/19/2010	4:08:58 PM	BCl3 MFC set to  0.000000
10/19/2010	4:08:58 PM	PHl3 MFC set to  0.000000
10/19/2010	4:08:58 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:08:58 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:08:58 PM	Tube furnace set to 0
10/19/2010	4:09:58 PM	Helium valve closed
10/19/2010	4:09:58 PM	H2 valve closed
10/19/2010	4:09:58 PM	BCl3 valve closed
10/19/2010	4:09:58 PM	PH3 valve closed
10/19/2010	4:09:58 PM	SiCl4 pre valve closed
10/19/2010	4:09:58 PM	SiCl4 post valve closed
10/19/2010	4:09:58 PM	Bubbler valve closed
10/19/2010	4:09:58 PM	Main Vac valve opened
10/19/2010	4:09:58 PM	Bypass valve opened
10/19/2010	4:09:58 PM	Helium MFC set to  0.000000
10/19/2010	4:09:58 PM	H2 MFC set to  0.000000
10/19/2010	4:09:58 PM	BCl3 MFC set to  0.000000
10/19/2010	4:09:58 PM	PHl3 MFC set to  0.000000
10/19/2010	4:09:58 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:09:58 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:09:58 PM	Tube furnace set to 0
10/19/2010	4:10:58 PM	H2 valve closed
10/19/2010	4:10:58 PM	BCl3 valve closed
10/19/2010	4:10:58 PM	PH3 valve closed
10/19/2010	4:10:58 PM	SiCl4 pre valve closed
10/19/2010	4:10:58 PM	SiCl4 post valve closed
10/19/2010	4:10:58 PM	Bubbler valve closed
10/19/2010	4:10:58 PM	Helium valve opened
10/19/2010	4:10:58 PM	Main Vac valve opened
10/19/2010	4:10:58 PM	Bypass valve opened
10/19/2010	4:10:58 PM	Helium MFC set to  100.000000
10/19/2010	4:10:58 PM	H2 MFC set to  0.000000
10/19/2010	4:10:58 PM	BCl3 MFC set to  0.000000
10/19/2010	4:10:59 PM	PHl3 MFC set to  0.000000
10/19/2010	4:10:59 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:10:59 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:10:59 PM	Tube furnace set to 0
10/19/2010	4:11:59 PM	Helium valve closed
10/19/2010	4:11:59 PM	H2 valve closed
10/19/2010	4:11:59 PM	BCl3 valve closed
10/19/2010	4:11:59 PM	PH3 valve closed
10/19/2010	4:11:59 PM	SiCl4 pre valve closed
10/19/2010	4:11:59 PM	SiCl4 post valve closed
10/19/2010	4:11:59 PM	Bubbler valve closed
10/19/2010	4:11:59 PM	Main Vac valve opened
10/19/2010	4:11:59 PM	Bypass valve opened
10/19/2010	4:11:59 PM	Helium MFC set to  0.000000
10/19/2010	4:11:59 PM	H2 MFC set to  0.000000
10/19/2010	4:11:59 PM	BCl3 MFC set to  0.000000
10/19/2010	4:11:59 PM	PHl3 MFC set to  0.000000
10/19/2010	4:11:59 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:11:59 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:11:59 PM	Tube furnace set to 0
10/19/2010	4:12:59 PM	H2 valve closed
10/19/2010	4:12:59 PM	BCl3 valve closed
10/19/2010	4:12:59 PM	PH3 valve closed
10/19/2010	4:12:59 PM	SiCl4 pre valve closed
10/19/2010	4:12:59 PM	SiCl4 post valve closed
10/19/2010	4:12:59 PM	Bubbler valve closed
10/19/2010	4:12:59 PM	Helium valve opened
10/19/2010	4:12:59 PM	Main Vac valve opened
10/19/2010	4:12:59 PM	Bypass valve opened
10/19/2010	4:12:59 PM	Helium MFC set to  100.000000
10/19/2010	4:12:59 PM	H2 MFC set to  0.000000
10/19/2010	4:12:59 PM	BCl3 MFC set to  0.000000
10/19/2010	4:12:59 PM	PHl3 MFC set to  0.000000
10/19/2010	4:12:59 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:12:59 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:12:59 PM	Tube furnace set to 0
10/19/2010	4:13:59 PM	Helium valve closed
10/19/2010	4:13:59 PM	H2 valve closed
10/19/2010	4:13:59 PM	BCl3 valve closed
10/19/2010	4:13:59 PM	PH3 valve closed
10/19/2010	4:13:59 PM	SiCl4 pre valve closed
10/19/2010	4:13:59 PM	SiCl4 post valve closed
10/19/2010	4:13:59 PM	Bubbler valve closed
10/19/2010	4:13:59 PM	Main Vac valve opened
10/19/2010	4:13:59 PM	Bypass valve opened
10/19/2010	4:13:59 PM	Helium MFC set to  0.000000
10/19/2010	4:13:59 PM	H2 MFC set to  0.000000
10/19/2010	4:13:59 PM	BCl3 MFC set to  0.000000
10/19/2010	4:13:59 PM	PHl3 MFC set to  0.000000
10/19/2010	4:13:59 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:13:59 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:13:59 PM	Tube furnace set to 0
10/19/2010	4:14:00 PM	Run finished at 4:14 PM
10/19/2010	4:14:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	4:15:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	4:15:33 PM	Recipe started at 4:15 PM
10/19/2010	4:15:33 PM	Helium valve closed
10/19/2010	4:15:33 PM	H2 valve closed
10/19/2010	4:15:33 PM	BCl3 valve closed
10/19/2010	4:15:33 PM	PH3 valve closed
10/19/2010	4:15:33 PM	SiCl4 pre valve closed
10/19/2010	4:15:33 PM	SiCl4 post valve closed
10/19/2010	4:15:33 PM	Main Vac valve closed
10/19/2010	4:15:33 PM	Bubbler valve closed
10/19/2010	4:15:33 PM	Bypass valve opened
10/19/2010	4:15:33 PM	Helium MFC set to  0.000000
10/19/2010	4:15:33 PM	H2 MFC set to  0.000000
10/19/2010	4:15:33 PM	BCl3 MFC set to  0.000000
10/19/2010	4:15:33 PM	PHl3 MFC set to  0.000000
10/19/2010	4:15:33 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:15:33 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:15:33 PM	Tube furnace set to 0
10/19/2010	4:15:33 PM	Helium valve closed
10/19/2010	4:15:33 PM	H2 valve closed
10/19/2010	4:15:33 PM	BCl3 valve closed
10/19/2010	4:15:33 PM	PH3 valve closed
10/19/2010	4:15:33 PM	SiCl4 pre valve closed
10/19/2010	4:15:33 PM	SiCl4 post valve closed
10/19/2010	4:15:33 PM	Bubbler valve closed
10/19/2010	4:15:33 PM	Main Vac valve opened
10/19/2010	4:15:33 PM	Bypass valve opened
10/19/2010	4:15:33 PM	Helium MFC set to  0.000000
10/19/2010	4:15:33 PM	H2 MFC set to  0.000000
10/19/2010	4:15:33 PM	BCl3 MFC set to  0.000000
10/19/2010	4:15:33 PM	PHl3 MFC set to  0.000000
10/19/2010	4:15:33 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:15:33 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:15:34 PM	Tube furnace set to 0
10/19/2010	4:16:34 PM	H2 valve closed
10/19/2010	4:16:34 PM	BCl3 valve closed
10/19/2010	4:16:34 PM	PH3 valve closed
10/19/2010	4:16:34 PM	SiCl4 pre valve closed
10/19/2010	4:16:34 PM	SiCl4 post valve closed
10/19/2010	4:16:34 PM	Bubbler valve closed
10/19/2010	4:16:34 PM	Helium valve opened
10/19/2010	4:16:34 PM	Main Vac valve opened
10/19/2010	4:16:34 PM	Bypass valve opened
10/19/2010	4:16:34 PM	Helium MFC set to  100.000000
10/19/2010	4:16:34 PM	H2 MFC set to  0.000000
10/19/2010	4:16:34 PM	BCl3 MFC set to  0.000000
10/19/2010	4:16:34 PM	PHl3 MFC set to  0.000000
10/19/2010	4:16:34 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:16:34 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:16:34 PM	Tube furnace set to 0
10/19/2010	4:17:34 PM	Helium valve closed
10/19/2010	4:17:34 PM	H2 valve closed
10/19/2010	4:17:34 PM	BCl3 valve closed
10/19/2010	4:17:34 PM	PH3 valve closed
10/19/2010	4:17:34 PM	SiCl4 pre valve closed
10/19/2010	4:17:34 PM	SiCl4 post valve closed
10/19/2010	4:17:34 PM	Bubbler valve closed
10/19/2010	4:17:34 PM	Main Vac valve opened
10/19/2010	4:17:34 PM	Bypass valve opened
10/19/2010	4:17:34 PM	Helium MFC set to  0.000000
10/19/2010	4:17:34 PM	H2 MFC set to  0.000000
10/19/2010	4:17:34 PM	BCl3 MFC set to  0.000000
10/19/2010	4:17:34 PM	PHl3 MFC set to  0.000000
10/19/2010	4:17:34 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:17:34 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:17:34 PM	Tube furnace set to 0
10/19/2010	4:18:34 PM	H2 valve closed
10/19/2010	4:18:34 PM	BCl3 valve closed
10/19/2010	4:18:34 PM	PH3 valve closed
10/19/2010	4:18:34 PM	SiCl4 pre valve closed
10/19/2010	4:18:34 PM	SiCl4 post valve closed
10/19/2010	4:18:34 PM	Bubbler valve closed
10/19/2010	4:18:34 PM	Helium valve opened
10/19/2010	4:18:34 PM	Main Vac valve opened
10/19/2010	4:18:34 PM	Bypass valve opened
10/19/2010	4:18:34 PM	Helium MFC set to  100.000000
10/19/2010	4:18:34 PM	H2 MFC set to  0.000000
10/19/2010	4:18:34 PM	BCl3 MFC set to  0.000000
10/19/2010	4:18:34 PM	PHl3 MFC set to  0.000000
10/19/2010	4:18:34 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:18:34 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:18:34 PM	Tube furnace set to 0
10/19/2010	4:19:34 PM	Helium valve closed
10/19/2010	4:19:34 PM	H2 valve closed
10/19/2010	4:19:34 PM	BCl3 valve closed
10/19/2010	4:19:34 PM	PH3 valve closed
10/19/2010	4:19:34 PM	SiCl4 pre valve closed
10/19/2010	4:19:34 PM	SiCl4 post valve closed
10/19/2010	4:19:34 PM	Bubbler valve closed
10/19/2010	4:19:34 PM	Main Vac valve opened
10/19/2010	4:19:34 PM	Bypass valve opened
10/19/2010	4:19:34 PM	Helium MFC set to  0.000000
10/19/2010	4:19:34 PM	H2 MFC set to  0.000000
10/19/2010	4:19:34 PM	BCl3 MFC set to  0.000000
10/19/2010	4:19:34 PM	PHl3 MFC set to  0.000000
10/19/2010	4:19:34 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:19:34 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:19:34 PM	Tube furnace set to 0
10/19/2010	4:20:34 PM	H2 valve closed
10/19/2010	4:20:34 PM	BCl3 valve closed
10/19/2010	4:20:34 PM	PH3 valve closed
10/19/2010	4:20:34 PM	SiCl4 pre valve closed
10/19/2010	4:20:34 PM	SiCl4 post valve closed
10/19/2010	4:20:34 PM	Bubbler valve closed
10/19/2010	4:20:34 PM	Helium valve opened
10/19/2010	4:20:34 PM	Main Vac valve opened
10/19/2010	4:20:34 PM	Bypass valve opened
10/19/2010	4:20:34 PM	Helium MFC set to  100.000000
10/19/2010	4:20:34 PM	H2 MFC set to  0.000000
10/19/2010	4:20:34 PM	BCl3 MFC set to  0.000000
10/19/2010	4:20:34 PM	PHl3 MFC set to  0.000000
10/19/2010	4:20:34 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:20:34 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:20:35 PM	Tube furnace set to 0
10/19/2010	4:21:35 PM	Helium valve closed
10/19/2010	4:21:35 PM	H2 valve closed
10/19/2010	4:21:35 PM	BCl3 valve closed
10/19/2010	4:21:35 PM	PH3 valve closed
10/19/2010	4:21:35 PM	SiCl4 pre valve closed
10/19/2010	4:21:35 PM	SiCl4 post valve closed
10/19/2010	4:21:35 PM	Bubbler valve closed
10/19/2010	4:21:35 PM	Main Vac valve opened
10/19/2010	4:21:35 PM	Bypass valve opened
10/19/2010	4:21:35 PM	Helium MFC set to  0.000000
10/19/2010	4:21:35 PM	H2 MFC set to  0.000000
10/19/2010	4:21:35 PM	BCl3 MFC set to  0.000000
10/19/2010	4:21:35 PM	PHl3 MFC set to  0.000000
10/19/2010	4:21:35 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:21:35 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:21:35 PM	Tube furnace set to 0
10/19/2010	4:22:35 PM	H2 valve closed
10/19/2010	4:22:35 PM	BCl3 valve closed
10/19/2010	4:22:35 PM	PH3 valve closed
10/19/2010	4:22:35 PM	SiCl4 pre valve closed
10/19/2010	4:22:35 PM	SiCl4 post valve closed
10/19/2010	4:22:35 PM	Bubbler valve closed
10/19/2010	4:22:35 PM	Helium valve opened
10/19/2010	4:22:35 PM	Main Vac valve opened
10/19/2010	4:22:35 PM	Bypass valve opened
10/19/2010	4:22:35 PM	Helium MFC set to  100.000000
10/19/2010	4:22:35 PM	H2 MFC set to  0.000000
10/19/2010	4:22:35 PM	BCl3 MFC set to  0.000000
10/19/2010	4:22:35 PM	PHl3 MFC set to  0.000000
10/19/2010	4:22:35 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:22:35 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:22:35 PM	Tube furnace set to 0
10/19/2010	4:23:35 PM	Helium valve closed
10/19/2010	4:23:35 PM	H2 valve closed
10/19/2010	4:23:35 PM	BCl3 valve closed
10/19/2010	4:23:35 PM	PH3 valve closed
10/19/2010	4:23:35 PM	SiCl4 pre valve closed
10/19/2010	4:23:35 PM	SiCl4 post valve closed
10/19/2010	4:23:35 PM	Bubbler valve closed
10/19/2010	4:23:35 PM	Main Vac valve opened
10/19/2010	4:23:35 PM	Bypass valve opened
10/19/2010	4:23:35 PM	Helium MFC set to  0.000000
10/19/2010	4:23:35 PM	H2 MFC set to  0.000000
10/19/2010	4:23:35 PM	BCl3 MFC set to  0.000000
10/19/2010	4:23:35 PM	PHl3 MFC set to  0.000000
10/19/2010	4:23:35 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:23:35 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:23:35 PM	Tube furnace set to 0
10/19/2010	4:24:35 PM	H2 valve closed
10/19/2010	4:24:35 PM	BCl3 valve closed
10/19/2010	4:24:35 PM	PH3 valve closed
10/19/2010	4:24:35 PM	SiCl4 pre valve closed
10/19/2010	4:24:35 PM	SiCl4 post valve closed
10/19/2010	4:24:35 PM	Bubbler valve closed
10/19/2010	4:24:35 PM	Helium valve opened
10/19/2010	4:24:35 PM	Main Vac valve opened
10/19/2010	4:24:35 PM	Bypass valve opened
10/19/2010	4:24:35 PM	Helium MFC set to  100.000000
10/19/2010	4:24:35 PM	H2 MFC set to  0.000000
10/19/2010	4:24:35 PM	BCl3 MFC set to  0.000000
10/19/2010	4:24:35 PM	PHl3 MFC set to  0.000000
10/19/2010	4:24:35 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:24:35 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:24:35 PM	Tube furnace set to 0
10/19/2010	4:25:35 PM	Helium valve closed
10/19/2010	4:25:35 PM	H2 valve closed
10/19/2010	4:25:35 PM	BCl3 valve closed
10/19/2010	4:25:35 PM	PH3 valve closed
10/19/2010	4:25:35 PM	SiCl4 pre valve closed
10/19/2010	4:25:35 PM	SiCl4 post valve closed
10/19/2010	4:25:35 PM	Bubbler valve closed
10/19/2010	4:25:35 PM	Main Vac valve opened
10/19/2010	4:25:35 PM	Bypass valve opened
10/19/2010	4:25:35 PM	Helium MFC set to  0.000000
10/19/2010	4:25:35 PM	H2 MFC set to  0.000000
10/19/2010	4:25:35 PM	BCl3 MFC set to  0.000000
10/19/2010	4:25:35 PM	PHl3 MFC set to  0.000000
10/19/2010	4:25:35 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:25:35 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:25:36 PM	Tube furnace set to 0
10/19/2010	4:26:36 PM	H2 valve closed
10/19/2010	4:26:36 PM	BCl3 valve closed
10/19/2010	4:26:36 PM	PH3 valve closed
10/19/2010	4:26:36 PM	SiCl4 pre valve closed
10/19/2010	4:26:36 PM	SiCl4 post valve closed
10/19/2010	4:26:36 PM	Bubbler valve closed
10/19/2010	4:26:36 PM	Helium valve opened
10/19/2010	4:26:36 PM	Main Vac valve opened
10/19/2010	4:26:36 PM	Bypass valve opened
10/19/2010	4:26:36 PM	Helium MFC set to  100.000000
10/19/2010	4:26:36 PM	H2 MFC set to  0.000000
10/19/2010	4:26:36 PM	BCl3 MFC set to  0.000000
10/19/2010	4:26:36 PM	PHl3 MFC set to  0.000000
10/19/2010	4:26:36 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:26:36 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:26:36 PM	Tube furnace set to 0
10/19/2010	4:27:36 PM	Helium valve closed
10/19/2010	4:27:36 PM	H2 valve closed
10/19/2010	4:27:36 PM	BCl3 valve closed
10/19/2010	4:27:36 PM	PH3 valve closed
10/19/2010	4:27:36 PM	SiCl4 pre valve closed
10/19/2010	4:27:36 PM	SiCl4 post valve closed
10/19/2010	4:27:36 PM	Bubbler valve closed
10/19/2010	4:27:36 PM	Main Vac valve opened
10/19/2010	4:27:36 PM	Bypass valve opened
10/19/2010	4:27:36 PM	Helium MFC set to  0.000000
10/19/2010	4:27:36 PM	H2 MFC set to  0.000000
10/19/2010	4:27:36 PM	BCl3 MFC set to  0.000000
10/19/2010	4:27:36 PM	PHl3 MFC set to  0.000000
10/19/2010	4:27:36 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:27:36 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:27:36 PM	Tube furnace set to 0
10/19/2010	4:28:36 PM	H2 valve closed
10/19/2010	4:28:36 PM	BCl3 valve closed
10/19/2010	4:28:36 PM	PH3 valve closed
10/19/2010	4:28:36 PM	SiCl4 pre valve closed
10/19/2010	4:28:36 PM	SiCl4 post valve closed
10/19/2010	4:28:36 PM	Bubbler valve closed
10/19/2010	4:28:36 PM	Helium valve opened
10/19/2010	4:28:36 PM	Main Vac valve opened
10/19/2010	4:28:36 PM	Bypass valve opened
10/19/2010	4:28:36 PM	Helium MFC set to  100.000000
10/19/2010	4:28:36 PM	H2 MFC set to  0.000000
10/19/2010	4:28:36 PM	BCl3 MFC set to  0.000000
10/19/2010	4:28:36 PM	PHl3 MFC set to  0.000000
10/19/2010	4:28:36 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:28:36 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:28:36 PM	Tube furnace set to 0
10/19/2010	4:29:36 PM	Helium valve closed
10/19/2010	4:29:36 PM	H2 valve closed
10/19/2010	4:29:36 PM	BCl3 valve closed
10/19/2010	4:29:36 PM	PH3 valve closed
10/19/2010	4:29:36 PM	SiCl4 pre valve closed
10/19/2010	4:29:36 PM	SiCl4 post valve closed
10/19/2010	4:29:36 PM	Bubbler valve closed
10/19/2010	4:29:36 PM	Main Vac valve opened
10/19/2010	4:29:36 PM	Bypass valve opened
10/19/2010	4:29:36 PM	Helium MFC set to  0.000000
10/19/2010	4:29:36 PM	H2 MFC set to  0.000000
10/19/2010	4:29:36 PM	BCl3 MFC set to  0.000000
10/19/2010	4:29:36 PM	PHl3 MFC set to  0.000000
10/19/2010	4:29:36 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:29:36 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:29:36 PM	Tube furnace set to 0
10/19/2010	4:30:36 PM	H2 valve closed
10/19/2010	4:30:36 PM	BCl3 valve closed
10/19/2010	4:30:36 PM	PH3 valve closed
10/19/2010	4:30:36 PM	SiCl4 pre valve closed
10/19/2010	4:30:36 PM	SiCl4 post valve closed
10/19/2010	4:30:36 PM	Bubbler valve closed
10/19/2010	4:30:36 PM	Helium valve opened
10/19/2010	4:30:36 PM	Main Vac valve opened
10/19/2010	4:30:36 PM	Bypass valve opened
10/19/2010	4:30:36 PM	Helium MFC set to  100.000000
10/19/2010	4:30:36 PM	H2 MFC set to  0.000000
10/19/2010	4:30:36 PM	BCl3 MFC set to  0.000000
10/19/2010	4:30:36 PM	PHl3 MFC set to  0.000000
10/19/2010	4:30:36 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:30:36 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:30:37 PM	Tube furnace set to 0
10/19/2010	4:31:37 PM	Helium valve closed
10/19/2010	4:31:37 PM	H2 valve closed
10/19/2010	4:31:37 PM	BCl3 valve closed
10/19/2010	4:31:37 PM	PH3 valve closed
10/19/2010	4:31:37 PM	SiCl4 pre valve closed
10/19/2010	4:31:37 PM	SiCl4 post valve closed
10/19/2010	4:31:37 PM	Bubbler valve closed
10/19/2010	4:31:37 PM	Main Vac valve opened
10/19/2010	4:31:37 PM	Bypass valve opened
10/19/2010	4:31:37 PM	Helium MFC set to  0.000000
10/19/2010	4:31:37 PM	H2 MFC set to  0.000000
10/19/2010	4:31:37 PM	BCl3 MFC set to  0.000000
10/19/2010	4:31:37 PM	PHl3 MFC set to  0.000000
10/19/2010	4:31:37 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:31:37 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:31:37 PM	Tube furnace set to 0
10/19/2010	4:32:37 PM	H2 valve closed
10/19/2010	4:32:37 PM	BCl3 valve closed
10/19/2010	4:32:37 PM	PH3 valve closed
10/19/2010	4:32:37 PM	SiCl4 pre valve closed
10/19/2010	4:32:37 PM	SiCl4 post valve closed
10/19/2010	4:32:37 PM	Bubbler valve closed
10/19/2010	4:32:37 PM	Helium valve opened
10/19/2010	4:32:37 PM	Main Vac valve opened
10/19/2010	4:32:37 PM	Bypass valve opened
10/19/2010	4:32:37 PM	Helium MFC set to  100.000000
10/19/2010	4:32:37 PM	H2 MFC set to  0.000000
10/19/2010	4:32:37 PM	BCl3 MFC set to  0.000000
10/19/2010	4:32:37 PM	PHl3 MFC set to  0.000000
10/19/2010	4:32:37 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:32:37 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:32:37 PM	Tube furnace set to 0
10/19/2010	4:33:37 PM	Helium valve closed
10/19/2010	4:33:37 PM	H2 valve closed
10/19/2010	4:33:37 PM	BCl3 valve closed
10/19/2010	4:33:37 PM	PH3 valve closed
10/19/2010	4:33:37 PM	SiCl4 pre valve closed
10/19/2010	4:33:37 PM	SiCl4 post valve closed
10/19/2010	4:33:37 PM	Bubbler valve closed
10/19/2010	4:33:37 PM	Main Vac valve opened
10/19/2010	4:33:37 PM	Bypass valve opened
10/19/2010	4:33:37 PM	Helium MFC set to  0.000000
10/19/2010	4:33:37 PM	H2 MFC set to  0.000000
10/19/2010	4:33:37 PM	BCl3 MFC set to  0.000000
10/19/2010	4:33:37 PM	PHl3 MFC set to  0.000000
10/19/2010	4:33:37 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:33:37 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:33:37 PM	Tube furnace set to 0
10/19/2010	4:34:37 PM	H2 valve closed
10/19/2010	4:34:37 PM	BCl3 valve closed
10/19/2010	4:34:37 PM	PH3 valve closed
10/19/2010	4:34:37 PM	SiCl4 pre valve closed
10/19/2010	4:34:37 PM	SiCl4 post valve closed
10/19/2010	4:34:37 PM	Bubbler valve closed
10/19/2010	4:34:37 PM	Helium valve opened
10/19/2010	4:34:37 PM	Main Vac valve opened
10/19/2010	4:34:37 PM	Bypass valve opened
10/19/2010	4:34:37 PM	Helium MFC set to  100.000000
10/19/2010	4:34:37 PM	H2 MFC set to  0.000000
10/19/2010	4:34:37 PM	BCl3 MFC set to  0.000000
10/19/2010	4:34:37 PM	PHl3 MFC set to  0.000000
10/19/2010	4:34:37 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:34:37 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:34:37 PM	Tube furnace set to 0
10/19/2010	4:35:37 PM	Helium valve closed
10/19/2010	4:35:37 PM	H2 valve closed
10/19/2010	4:35:37 PM	BCl3 valve closed
10/19/2010	4:35:37 PM	PH3 valve closed
10/19/2010	4:35:37 PM	SiCl4 pre valve closed
10/19/2010	4:35:37 PM	SiCl4 post valve closed
10/19/2010	4:35:37 PM	Bubbler valve closed
10/19/2010	4:35:37 PM	Main Vac valve opened
10/19/2010	4:35:37 PM	Bypass valve opened
10/19/2010	4:35:37 PM	Helium MFC set to  0.000000
10/19/2010	4:35:37 PM	H2 MFC set to  0.000000
10/19/2010	4:35:37 PM	BCl3 MFC set to  0.000000
10/19/2010	4:35:37 PM	PHl3 MFC set to  0.000000
10/19/2010	4:35:37 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:35:37 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:35:38 PM	Tube furnace set to 0
10/19/2010	4:35:39 PM	Run finished at 4:35 PM
10/19/2010	4:35:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/19/2010	4:42:46 PM	Recipe started at 4:42 PM
10/19/2010	4:42:46 PM	Helium valve closed
10/19/2010	4:42:46 PM	BCl3 valve closed
10/19/2010	4:42:46 PM	PH3 valve closed
10/19/2010	4:42:46 PM	SiCl4 pre valve closed
10/19/2010	4:42:46 PM	SiCl4 post valve closed
10/19/2010	4:42:46 PM	Main Vac valve closed
10/19/2010	4:42:46 PM	Bypass valve closed
10/19/2010	4:42:46 PM	Bubbler valve closed
10/19/2010	4:42:46 PM	H2 valve opened
10/19/2010	4:42:46 PM	Helium MFC set to  0.000000
10/19/2010	4:42:46 PM	H2 MFC set to  500.000000
10/19/2010	4:42:46 PM	BCl3 MFC set to  0.000000
10/19/2010	4:42:46 PM	PHl3 MFC set to  0.000000
10/19/2010	4:42:46 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:42:46 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:42:46 PM	Tube furnace set to 0
10/19/2010	4:44:05 PM	Helium valve closed
10/19/2010	4:44:05 PM	BCl3 valve closed
10/19/2010	4:44:05 PM	PH3 valve closed
10/19/2010	4:44:05 PM	SiCl4 pre valve closed
10/19/2010	4:44:05 PM	SiCl4 post valve closed
10/19/2010	4:44:05 PM	Main Vac valve closed
10/19/2010	4:44:05 PM	Bypass valve closed
10/19/2010	4:44:05 PM	H2 valve opened
10/19/2010	4:44:05 PM	Bubbler valve opened
10/19/2010	4:44:05 PM	Helium MFC set to  0.000000
10/19/2010	4:44:05 PM	H2 MFC set to  500.000000
10/19/2010	4:44:05 PM	BCl3 MFC set to  0.000000
10/19/2010	4:44:05 PM	PHl3 MFC set to  0.000000
10/19/2010	4:44:05 PM	SiCl4 MFC set to  0.000000
10/19/2010	4:44:05 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	4:44:06 PM	Tube furnace set to 1000
10/19/2010	5:04:06 PM	Helium valve closed
10/19/2010	5:04:06 PM	PH3 valve closed
10/19/2010	5:04:06 PM	Main Vac valve closed
10/19/2010	5:04:06 PM	Bypass valve closed
10/19/2010	5:04:06 PM	H2 valve opened
10/19/2010	5:04:06 PM	BCl3 valve opened
10/19/2010	5:04:06 PM	SiCl4 pre valve opened
10/19/2010	5:04:06 PM	SiCl4 post valve opened
10/19/2010	5:04:06 PM	Bubbler valve opened
10/19/2010	5:04:06 PM	Helium MFC set to  0.000000
10/19/2010	5:04:06 PM	H2 MFC set to  500.000000
10/19/2010	5:04:06 PM	BCl3 MFC set to  12.000000
10/19/2010	5:04:06 PM	PHl3 MFC set to  0.000000
10/19/2010	5:04:06 PM	SiCl4 MFC set to  50.000000
10/19/2010	5:04:06 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	5:04:06 PM	Tube furnace set to 1000
10/19/2010	5:17:26 PM	H2 valve closed
10/19/2010	5:17:26 PM	BCl3 valve closed
10/19/2010	5:17:26 PM	PH3 valve closed
10/19/2010	5:17:26 PM	SiCl4 pre valve closed
10/19/2010	5:17:26 PM	SiCl4 post valve closed
10/19/2010	5:17:26 PM	Main Vac valve closed
10/19/2010	5:17:26 PM	Bypass valve closed
10/19/2010	5:17:26 PM	Helium valve opened
10/19/2010	5:17:26 PM	Bubbler valve opened
10/19/2010	5:17:26 PM	Helium MFC set to  500.000000
10/19/2010	5:17:26 PM	H2 MFC set to  0.000000
10/19/2010	5:17:26 PM	BCl3 MFC set to  0.000000
10/19/2010	5:17:26 PM	PHl3 MFC set to  0.000000
10/19/2010	5:17:26 PM	SiCl4 MFC set to  0.000000
10/19/2010	5:17:26 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	5:17:26 PM	Tube furnace set to 0
10/19/2010	5:37:26 PM	Helium valve closed
10/19/2010	5:37:26 PM	H2 valve closed
10/19/2010	5:37:26 PM	BCl3 valve closed
10/19/2010	5:37:26 PM	PH3 valve closed
10/19/2010	5:37:26 PM	SiCl4 pre valve closed
10/19/2010	5:37:26 PM	SiCl4 post valve closed
10/19/2010	5:37:26 PM	Main Vac valve closed
10/19/2010	5:37:26 PM	Bypass valve closed
10/19/2010	5:37:26 PM	Bubbler valve closed
10/19/2010	5:37:26 PM	Helium MFC set to  0.000000
10/19/2010	5:37:26 PM	H2 MFC set to  0.000000
10/19/2010	5:37:26 PM	BCl3 MFC set to  0.000000
10/19/2010	5:37:26 PM	PHl3 MFC set to  0.000000
10/19/2010	5:37:26 PM	SiCl4 MFC set to  0.000000
10/19/2010	5:37:26 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	5:37:26 PM	Tube furnace set to 0
10/19/2010	5:37:26 PM	Run finished at 5:37 PM
10/19/2010	5:47:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2010	5:47:39 PM	Recipe started at 5:47 PM
10/19/2010	5:47:39 PM	Helium valve closed
10/19/2010	5:47:39 PM	H2 valve closed
10/19/2010	5:47:39 PM	BCl3 valve closed
10/19/2010	5:47:39 PM	PH3 valve closed
10/19/2010	5:47:39 PM	SiCl4 pre valve closed
10/19/2010	5:47:39 PM	SiCl4 post valve closed
10/19/2010	5:47:39 PM	Main Vac valve closed
10/19/2010	5:47:39 PM	Bubbler valve closed
10/19/2010	5:47:39 PM	Bypass valve opened
10/19/2010	5:47:39 PM	Helium MFC set to  0.000000
10/19/2010	5:47:39 PM	H2 MFC set to  0.000000
10/19/2010	5:47:39 PM	BCl3 MFC set to  0.000000
10/19/2010	5:47:39 PM	PHl3 MFC set to  0.000000
10/19/2010	5:47:39 PM	SiCl4 MFC set to  0.000000
10/19/2010	5:47:39 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	5:47:39 PM	Tube furnace set to 0
10/19/2010	5:48:27 PM	Helium valve closed
10/19/2010	5:48:27 PM	H2 valve closed
10/19/2010	5:48:27 PM	BCl3 valve closed
10/19/2010	5:48:27 PM	PH3 valve closed
10/19/2010	5:48:27 PM	SiCl4 pre valve closed
10/19/2010	5:48:27 PM	SiCl4 post valve closed
10/19/2010	5:48:27 PM	Bubbler valve closed
10/19/2010	5:48:27 PM	Main Vac valve opened
10/19/2010	5:48:27 PM	Bypass valve opened
10/19/2010	5:48:27 PM	Helium MFC set to  0.000000
10/19/2010	5:48:27 PM	H2 MFC set to  0.000000
10/19/2010	5:48:27 PM	BCl3 MFC set to  0.000000
10/19/2010	5:48:27 PM	PHl3 MFC set to  0.000000
10/19/2010	5:48:27 PM	SiCl4 MFC set to  0.000000
10/19/2010	5:48:27 PM	Bypass solenoid MFC set to  0.000000
10/19/2010	5:48:27 PM	Tube furnace set to 0
10/19/2010	5:48:27 PM	Run finished at 5:48 PM
10/19/2010	5:48:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
